MODIFICATION
44 -- High Temperature Furnace System
- Notice Date
- 6/22/2010
- Notice Type
- Modification/Amendment
- NAICS
- 333994
— Industrial Process Furnace and Oven Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-10-RQ-0296
- Archive Date
- 7/30/2010
- Point of Contact
- Joni L Laster, Phone: 301-975-8397, Carol A. Wood, Phone: 301-975-8172
- E-Mail Address
-
joni.laster@nist.gov, carol.wood@nist.gov
(joni.laster@nist.gov, carol.wood@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- The purpose of this amendment is to respond to technical questions submitted, incorporate a due date for all technical questions and extend the due date for quotations. 1. The following questions and responses are hereby provided. 1.1 Question: Your requirement is for a space large enough for a 4" diameter, but what about the depth? How many wafers are to be processed at one time? 1.1.1 Answer: The depth is specified as 4", the same as the height and width. One four-inch wafer should fit in the hot zone space in any orientation. 1.2 Question: What material do you require for the hot zone as there are limited choices at 2100C? 1.2.1 Answer: Graphite hot zone as specified 1.3 Question: Do you want automatic controls or manual? 1.3.1 Answer: The controls for the heater power supplied to the hot zone shall be automatic, and fully under the control of the temperature controller, with automatic safety override in case of over-temperature. There shall also be a communication bus to allow a remote computer to control and read data from the programmable temperature controller. There shall be an electronically-controlled butterfly conductance control valve in the pumping line. The automatic controls for the background gas pressure are limited to that provided for this butterfly conductance control valve by the automatic valve controller unit, with manual control required for the inlet gas pressure and flow rate. Also, as stated in section 4.6, "Electronic vacuum gauge and conductance valve controller configured to enable front-panel control of the system pressure, equipped with a communication bus to allow remote computer control of the pressure control system including operation of vacuum gauge and the controller." All safety power interlocks shall be fully automatic. 1.4 Question: Do you want any data logging capability? 1.4.1 Answer: Data logging for hot zone temperature and vacuum chamber pressure shall be possible through the communication bus, using a Windows-based PC (user supplied). 1.5 Question: Do you want to interlock your gas flow to a certain vacuum level attained? 1.5.1 Answer: No pre-set interlock is required. The user shall be able to set the conductance valve controller to maintain a desired pressure, subject to the constraints of the inlet gas flow rate and the pumping rate maintained by the user-supplied dry vacuum pump. 2. All questions must be submitted no later than 12 noon on June 24, 2010. Only questions received by this date/time shall be addressed. 3. The due for quotes has been changed as follows: FROM: June 28, 2010 @ 3pm EST TO: June 29, 2010 @ 12 pm EST
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-10-RQ-0296/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02184314-W 20100624/100622235120-2cdbd36aa3220d4ab1fa34eebe0d8764 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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