SOURCES SOUGHT
66 -- METAL LIFT OFF TOOL
- Notice Date
- 2/15/2011
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- 02152011LIFTOFF
- Archive Date
- 3/26/2011
- Point of Contact
- Carol A. Wood, Phone: 301-975-8172, Carol A. Wood, Phone: 301-975-8172
- E-Mail Address
-
carol.wood@nist.gov, carol.wood@nist.gov
(carol.wood@nist.gov, carol.wood@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- This is a SOURCES SOUGHT NOTICE for market research purposes. The National Institute of Standards & Technology (NIST) seeks information on commercial vendors capable of providing a Metal Liftoff Tool in support of several on-going scientific and technical research projects in the Center for Nanoscale Science and Technology (CNST) NanoFab laboratory. The system will be sited and used in a multi-user facility. After the results of this market research are obtained and analyzed and specifications are developed for a Metal Liftoff Tool that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small business manufacturers are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. The system would need to meet the following requirements: 1. SCOPE: The CNST NanoFab at NIST is seeking a Metal Liftoff Tool capable of lifting various evaporated metals off of under layers of positive photo resist and undercut liftoff resist. Currently the NanoFab uses heated PG remover as the primary liftoff solvent. NIST will consider other liftoff technologies that meet the basic process specifications. 2. SUBSTRATE SIZE: System must be capable of handling substrates from small irregular shaped pieces up to and including 150mm wafer rounds with minimal retooling necessary. 3. BASIC PROCESS SPECIFICATIONS 3.1 Dry wafer in, dry wafer out process; 3.2 Automatic or manually loaded system; 3.3 Automatic process under recipe control; 3.4 Include information regarding type of process proposed including processing consumables; 3.5 Final process must produce a clean wafer with no residual lift off material or resist present; 3.6 Solvent based systems must include a DI rinse to a separate drain system; 3.7 Must demonstrate solid prior experience with this type of equipment. 4. HARDWARE SPECIFICATIONS 4.1 Include a list of all major components; 4.2 Include facility requirements for whole system; 4.3 Include footprint of all major components and maximum distance from main unit; 4.4 Solvent based systems must be capable of capturing all solvent waste and ensuring no solvents enter house drain system. 5. TECHNICAL SUPPORT is required including installation, as well as process development of baseline lift off recipe on 4" Si wafers and 1cm square Si wafers. 6. OPERATING SOFTWARE: Must be capable of software/recipe backup. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Companies that manufacture these types of systems are requested to email a detailed report describing their capabilities to carol.wood@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications, indicate if and where a demonstration system is available to run NIST samples if required, identify existing systems that are currently installed and operating in multi-user type facilities, and any other information relevant to your product or capabilities. NIST does not require samples to be run as a part of responses to this sources sought notice. Also, the following information must be provided as part of the response to this sources sought notice: 1. Name and business size of the company that manufactures the system for which specifications are provided; 2. Name of company(ies) that are authorized to sell the systems, their addresses, and a point of contact for the company (name, phone number, fax number and email address); 3. Indication of number of days, after receipt of order that is typical for delivery of such equipment; 4. Indication of whether each system (including installation) for which specifications are sent to carol.wood@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s); 5. Any other relevant information that is not listed above which the Government should consider in finalizing its market research. All documentation must be sent to Carol A. Wood, Contract Specialist, at the National Institute of Standards and Technology, Acquisition Management Division, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. E-mail address: CAROL.WOOD@NIST.GOV. Submission must be received not later than 3:30 PM Easter Time on March 11, 2011.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/02152011LIFTOFF/listing.html)
- Place of Performance
- Address: NIST, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02380443-W 20110217/110215234446-1951698df0e8aa3cfb4471ed74baa427 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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