AWARD
A -- LOAD-LOCKED REACTIVE ION ETCHER FOR FLOURINE CHEMISTRY
- Notice Date
- 3/17/2011
- Notice Type
- Award Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Goddard Space Flight Center, Code 210.M, Greenbelt, MD 20771
- ZIP Code
- 20771
- Solicitation Number
- NNG10338403R
- Response Due
- 11/1/2010
- Archive Date
- 7/2/2011
- Point of Contact
- MARK ANTHONY BUDDOO, CONTRACT SPECIALIST, Phone 301-286-4380, Fax 301-286-1720, Email MARK.A.BUDDOO@NASA.GOV - Caesar Gooden, Contracting Officer, Phone 301-286-0109, Fax 301-286-1720, Email caesar.gooden-1@nasa.gov
- E-Mail Address
-
MARK ANTHONY BUDDOO
(MARK.A.BUDDOO@NASA.GOV)
- Small Business Set-Aside
- N/A
- Award Number
- NNG11CR25C
- Award Date
- 2/10/2011
- Awardee
- Trion Technology, INC. 1025 S 52nd Street Tempe, AZ 85281-5217
- Award Amount
- 232655.00
- Description
- NASA Goddard Space Flight Centers (GSFC) Detector Development Laboratory (DDL)produces multilayer circuits on four inch and six inch silicon wafers for technologydemonstrations and flight hardware of detector focal planes and other components. Anessential tool required to build these circuits is a reactive ion etcher (RIE) that canchemically etch thin metal and dielectric films on planar substrates
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/NASA/GSFC/OPDC20220/NNG10338403R/listing.html)
- Record
- SN02403563-W 20110319/110317234819-477ce0f8082f7670ef047a17a9134f00 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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