SOLICITATION NOTICE
66 -- Profilometer
- Notice Date
- 3/18/2011
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB620010-11-01643
- Archive Date
- 4/19/2011
- Point of Contact
- Prateema E. Carvajal, Phone: 301-975-4390, Andrea A Parekh, Phone: (301)975-6984
- E-Mail Address
-
prateema.carvajal@nist.gov, andrea.parekh@nist.gov
(prateema.carvajal@nist.gov, andrea.parekh@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT SHALL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-48. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. However, this requirement is unrestricted and all interested Contractor's may submit a quote. All responsible quoters shall provide a quotation for the following line item: LINE ITEM 0001: Quantity one (1) each, Surface Contact Profilometer Background Information: NIST is seeking to purchase a Contact Profilometer. The system shall be capable of handling substrates from small irregular shaped pieces up to and including 150mm wafer rounds with minimal re-tooling. The Contractor shall meet or exceed the following minimum technical specifications: General Requirements: The system shall be capable of handling substrates from small irregular shaped pieces up to and including 150mm wafer rounds with minimal re-tooling. 1. Footprint and installation. • Instrument and/or combined instrument shall conform to standard table dimensions (<= 915 mm square max). • Shall provide vibration isolation table or other apparatus to suppress mechanical vibration such as to allow operation within a class 100 clean room. • Shall provide acoustical vibration isolation via an external cover over said instrument or by mechanical design of the instrument to allow operation within a class 100 clean room. 2. Stage and Sample Holder specifications • Stage shall be able to accommodate small piece parts (<= 5 mm square) • Stage shall be able to accommodate 75 mm thru 150mm round Semiconductor Equipment and Materials International (SEMI) standard wafers dimensions and thickness'. • Stage shall be able to accommodate square photo masks up to 6 inches (152.4mm) and thickness up to 250 mil (6.35mm) • Stage shall consist of a user operated mechanical translation stage consisting of knobs or other device such as to allow operation with latex gloved covered human hand. • Wafer chuck or piece part holder shall provide for a manually or automatically actuated vacuum clamping mechanism. • Stage motion during measurement shall allow for multiple repeated measurements in single X and multiple stepped Y dimensions. • Manual or automated x-y translation stages will be considered for this procurement. However, stronger consideration will be given to the vendor that offers an automated x-y translation stage 3. Measurement Head specifications • Stylus force shall be capable of a range between 0.05 mg to 15 mg. • Shall provide two stylii with system: 0.7 micrometer and 12.5 micrometer diameter. • Software shall provide for automatic leveling of acquired data • Shall provide visual location of measurement stylus location with manual/fixed focus. • Shall handle sample sizes up to 1 mm in height. 4. Included Accessories: Contractor shall provide two reference standards, either NIST SRMS or NIST Traceable SRMS • Must meet NIST or NIST traceable Step Height Standard #1 (100 nm or smaller step height) • Must meet NIST or NIST traceable Step Height Standard #2 (between 500 nm and 1000 nm step heights) • 12.5 micrometer diameter stylus • 0.7 micrometer diameter stylus • Tooling necessary to replace stylus • Storage containers for each styli 5. Utilities Contractor shall indicate and include utilities required for installation Power (voltage, current, phase) and Nitrogen. 6. Warranty: A one (1) year parts and labor warranty shall be included. 7. Acceptance Criteria • Testing shall occur at Contractor's Facility prior to shipping the system to NIST and Testing shall be performed with both SRM(s) in shipment. SRMS then are property of NIST. 8. Offeror's must provide all documentation in electronic format with the quotation. All Software in CD/DVD Format (including license information) must be provided after installation. Documentation includes: i. Complete parts list ii. Consumables parts list iii. Drawings of all consumables 9. Installation shall include, at a minimum, the following: The system shall be installed by the Contractor and meet contract specifications no later than 45 days after delivery. Installation, at a minimum, shall include set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD. 10. Training, at a minimum, shall include: The contractor shall conduct one (1) training session at NIST. The training shall provide a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation, but shall be completed no later than 30 days after installation. The following measurement test results/data must be provided with the quotation package. Each offeror will be evaluated based upon the following testing requirements. • Measurement Tests i. Total System Noise Test #1:Wafer Stage Stationary: Stylus in Scan: Stylus non contact: Stylus is not in contact with surface. The average of 15 scans over 55mm of stylus travel with stage at location X=0 mm, Y = 0 mm. ii. Total System Noise Test #2: Wafer Stage in Scan: Stylus in Scan: Stylus non contact: Stylus is not in contact with surface. The average of 15 scans over 50 mm of stylus travel and at least 50 mm of stage travel. Stylus and stage are both in motion for this measurement. Stage will start at position X=0 mm and Y=0 mm then travel in either X or Y direction for at least 50 mm. iii. Total System Noise Test #3: Wafer Stage Stationary.: Stylus in Scan: Stylus in contact: Stylus is in contact with optical flat surface. Test optical flatness should be lamba over twenty flatness. The average of 15 scans over 0.50 mm of stylus travel. Stylus in motion for this measurement. Stage will be at position X=0 mm and Y=0 mm. iv. Total System Noise Test #4: Wafer Stage Stationary: Stylus in Scan: Stylus in contact: Stylus is in contact with optical flat surface. Test optical flatness should be lamba over twenty.The average of 15 scans over 2 mm of stylus travel. Stylus in motion for this measurement. Stage will be at position X=0 mm and Y=0 mm. v. Total System Noise Test #5: Wafer Stage Stationary: Stylus in Scan: Stylus in contact: Stylus is in contact with optical flat surface. The average of 15 scans over 50 mm of stylus travel. Stylus in motion for this measurement. Stage will be at position X=0 mm and Y=0 mm. vi. Step Height Accuracy and Repeatability Test #1(100 nm or smaller step height) Using a NIST or NIST traceable Step Height Standard at 100nm or smaller step height, measure the average of 15 scans of the absolute step height at the calibrated location and compute the standard deviation of the measurements. vii. Step Height Accuracy and Repeatability Test #2 (between 500 nm and 1000 nm step heights) Using a NIST or NIST traceable Step Height Standard between 500nm and 100nm in step height, measure the average of 15 scans of the absolute step height at the calibrated location and compute the standard deviation of the measurements. viii. Stage Position Repeatability Test #1: Measure stage positioning accuracy. Stage will start at position X=0 mm and Y=0 mm and translate stage to a defined feature on a vendor supplied test wafer, then perform a step height measurement. Return to position X = 0 mm, Y = 0 mm. Repeat measurement for a total of 15 translations with 15 step height measurements. Report average and standard deviation of X and Y location of target feature at location. At least 5 locations within 100 mm radius must be performed at locations defined as: (0,0) (+X,+Y) (-X,-Y) (-X,+Y), (+X,-Y) where X and Y are vendor specific locations and at least outside 50 mm radius from origin (X= 0mm, Y = 0mm). OPTION LINE ITEMS: The following items are option line items. The Contractor shall provide pricing for these items. Prices quoted shall be effective for a period of one year from the date of award. Award of option line items is at the sole discretion of the Government in accordance with 52.217-7. OPTION LINE ITEM 0002: Preventative Maintenance: Year two (2) preventative maintenance. Shall include a minimum of one (1) preventative maintenance service visit per year and include Lubrication of assemblies, cleaning of optics, corrective actions prescribed upon equipment logs. OPTION LINE ITEM 0003: Preventative Maintenance: Year three (3) preventative maintenance. Shall include a minimum of one (1 ) preventative maintenance service visit per year and include Lubrication of assemblies, cleaning of optics, corrective actions prescribed upon equipment logs. Delivery terms shall be FOB Destination. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Gaithersburg, MD 20899. Award shall be made to the Contractor whose quote offers the best value to the Government, price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement", 2) Past Performance, 3) Experience and 4) Price. Technical capability, past performance, and experience, when combined, shall be approximately equal to price. If Technical Capability, Past Performance, and Experience are equivalent, price shall be the determining factor. Technical Capability: Evaluation of Technical Capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. Quoters shall also include product literature which addresses all specifications & clearly documents that the product offered meets or exceeds the specifications identified herein. Note: If an offeror does not indicate whether its proposed equipment meets a certain technical requirement, NIST will determine that it does not. UNDER THE TECHNICAL CAPABILITY FACTOR, STRONGER CONSIDERATION WILL BE GIVEN TO THE QUOTE THAT EXCEEDS THE FOLLOWING MINIMUM SPECIFICATIONS: 1. Stage travel shall have travel range of 150 mm in X dimension and 150 mm and Y direction (min) or better 2. Measurement scan length shall be 55 mm or better 3. Stronger consideration shall be given for an automated x-y translation stage Past Performance Past Performance will be evaluated to determine the overall quality of the product & service provided and the Contractor's history of meeting delivery schedules for prior deliverables. Evaluation of Past Performance shall be based on the references provided and/or the quoters recent and relevant procurement history with NIST or its' affiliates. Offerors should provide a list of 3-5 references to whom the same or similar equipment has been provided. Experience The Contractor shall describe their experience performing similar work; explain how their experience is relevant to this project and how their experience will ensure successful completion of the project. NIST will evaluate the extent of the offeror's experience providing similar equipment and will consider the relevance of the offeror's experience to the current requirement. The Contractor shall provide demonstrate that they currently have five (5) of the quoted systems currently in the field within the United States. Past Performance, Experience, and Price shall not be evaluated on quotes that are determined technically unacceptable in accordance with the Technical Capability Evaluation factor. The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: 52.217-5 Evaluation of Options 52.219-28 Post-Award Small Business Program Re-Representation; 52.222-3, Convict Labor; 52.222-19 Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52-222-26, Equal Opportunity; 52.222-36, Affirmative Action for Workers with Disabilities; 52.223-18, Contractor policy to ban text messaging while driving; 52.225-3 Buy America Act -Free Trade Agreements-Israel Trade Act 52.225-3 Alternate II (Jan 2004) 52.225-13 Restriction on Certain Foreign Purchases; 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. 52.217-7 Option for Increased Quantity - Separately Priced Line Item: The Government may require the delivery of the numbered line item, identified in the Schedule as an option item, in the quantity and at the price stated in the Schedule. The Contracting Officer may exercise the option by written notice to the Contractor within one day from date of expiration. Delivery of added items shall continue at the same rate that like items are called for under the contract, unless the parties otherwise agree. All quoters shall submit the following with the quotation: 1) An original and one (1) copy of a quotation which addresses all line items. 2) Measurement test results/data per 3) Documentation in electronic format listed under specification # 8; 4) For the purpose of evaluating technical capability: Technical description and/or product literature which clearly addresses all required specifications, and clearly documents that the offered product(s) meet(s) or exceeds the specifications stated herein. 5) Description of commercial warranty. 6) An original and one (1) copy of the most recent published price list(s). 7) Past performance references which must include the company/organizations name, contact person, phone number, and e-mail address. 8) Description of experience This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that shall include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government shall accept the quoted price. However, the terms and conditions stated herein shall be included in any resultant Purchase Order, not the terms and conditions of the offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. All quotes shall be received not later than 3:00 PM local time, on April 4, 2011 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B125, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Prateema Carvajal. Quoters must submit all questions concerning this solicitation in writing to Prateema.carvajal@nist.gov. Questions should be received no later than 7 calendar days after the issuance date of this solicitation. Any responses to questions shall be made in writing, without identification of the questioner, and shall be included in an amendment to the solicitation. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 24-hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-4390. E-mail quotes ARE acceptable. Fax quotes shall NOT be accepted. Quotations shall not be deemed received by the Government until the quotation is entered into the e-mail address inbox set forth above.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB620010-11-01643/listing.html)
- Place of Performance
- Address: NIST, 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02404610-W 20110320/110318234642-2043509bc945adcae903d80911372611 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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