SOLICITATION NOTICE
N -- RAPID THERMAL PROCESSING SYSTEM
- Notice Date
- 4/5/2011
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- RDECOM Contracting Center - Adelphi (RDECOM-CC), ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX11T0071
- Response Due
- 4/12/2011
- Archive Date
- 6/11/2011
- Point of Contact
- Barbara DeSchepper, 410-278-5425
- E-Mail Address
-
RDECOM Contracting Center - Adelphi (RDECOM-CC)
(barbara.deschepper@us.army.mil)
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. 8.(i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-11-T-0071. This acquisition is issued as an RFQ. (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 05-48. (iv) This acquisition is set-aside for Small business. The associated NAICS code is 334413. The small business size standard is 500 employees (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 AUTOMATED RAPID THERMAL PROCESSING SYSTEM CONFIGURED IN ACCORDANCE WITH THE STATEMENT OF WORK (SOW) CLIN 0002 OPTIONAL ACCESSORIES: SPARE PARTS INCLUDING QUARTZ TUBE, QUARTZ TRAY, THERMOCOUPLE WAFER, AND END EFFECTOR IN ACCORDANCE WITH THE STATEMENT OF WORK (SOW) CLIN 0003 CONTRACTING MANPOWER REPORTING Cost for Providing Accounting for Contract Services - RDECOM CC 001-10, Accounting for Contract Services Requirement, is included herein; the contractor is required to provide data on contractor manpower (including subcontractor manpower) for performance of this contract, in accordance with clause RDECOM CC 001-10, located in Section C. Instructions, including the Contractor and Subcontractor User Guides, are available at the CMRA (Contractor Manpower Reporting Application) website at: https://cmra.army.mil. For further assistance, email the CMRA Help Desk at contractormanpower@hqda.army.mil. (vi)Description of requirements: STATEMENT OF WORK C.1 Background The US Army Research Laboratory (ARL), Adelphi, MD requires a commercially available automated rapid thermal anneal/process (RTA) or RTP) system. Processing piezoelectric materials comprised of lead zirconate titanate (PZT) is central to micro and nanodevice processing in the Specialty Electronic Materials and Sensors Cleanroom (SEMASC) facility. The RTA or RTP is critical to ensuring proper crystallization within PZT thin films so as to meet mission requirements. C.2 Requirements (CLIN 0001) The Contractor shall ensure that the available automated RTA or RTP system meets the materials compatibility listed in Table one (1) and specifications listed in Table two (2). Table 1. RTA/RTP Processed Materials Lead zirconate titanate (PZT) Lead titanate (PT) Plasma Enhanced Chemical Vapor Deposited (PECVD) Silicon Dioxide (SiO2) Titanium Dioxide (TiO2) Table 2. Specifications: Properties and Values of Required Processed Materials PROPERTYVALUE Uniformity across wafer [percent]greater than or equal to plus or minus 3.0 Uniformity wafer to wafer in batch [percent]greater than or equal to plus or minus 3.0 Uniformity across run [percent]greater than or equal to plus or minus 3.0 Uniformity run to run [percent]greater than or equal to plus or minus 3.0 Thermal Processing System - The Contractor shall ensure that the RTA/RTP system consists of the following: - a temperature heating rate of at least 100 degrees Celsius per second. - robotic wafer handling capable of operating with 100 millimeter (mm), 150mm, and 200mm diameter wafer sizes - a minimum temperature range of operation of 300 degrees Celsius to 900 degrees Celsius - across wafer temperature uniformity of plus or minus one (1) percent over full temperature range with no oscillations in temperature - an integrated chill station to thermally cool wafers prior to returning to wafer cassettes - a quartz processing chamber configured with a replaceable quartz liner - has a quartz wafer processing tray - a quad-layer tungsten halogen lamp array with individual lamp control - type N thermocouple temperature measurement. - an extended range pyrometer plus (ERP plus) internally cooled for extended temperature range from 350 to 1250 degrees Celsius - an electro polished stainless steel (316 liter) gas plumbing with VCR style connectors - three (3) mass flow controller (MFC) controlled gas lines for use with Argon, Nitrogen, and Oxygen gases - atmospheric pressure operation within process chamber - an integrated pre-mixing of gas prior to entry into processing chamber - fully exhausted such that all vapors generated during the thermal process are captured and are sent through Army Research Laboratory's (ARL) scrubbed exhaust - computer controlled interface for operating system - meet coating thickness performance requirements as outlined in Table two (2) - across wafer uniformity ranging from zero (0) to three (3) percent - wafer-to-wafer uniformity ranging from zero (0) to three (3) percent - computer controls with the following attributes: - Computer controller with integrated touch screen monitor - Multi-tasking multi-processor, real-time process control for maximum wafer throughput - Flexible calibration and robot alignment routines - User configurable password assignments - Real-time process data logging - Tracking by lot and wafer number - Alarm log with date and time in text format - Event log with date and time in text format - Local hard disk storage of all data - File transfer via 3.5 inch Floppy and/or a CD-RW and/or a Universal Serial Bus (USB) port for flash drive storage - Recipe file storage and retrieval - Gas compatibility safety tests during recipe creation - Interlock monitoring during processing - electrical components based on voltages, frequency and currents used in the USA - Class 100 compatibility in its entirety - has process programming and history logging backup through a disk drive based system (3.5 inch Floppy and/or a CD-RW) and/or a USB port for flash drive storage. - control systems that are operated in automatic mode utilizing one of the three modes: - programmed process operations - semi-automatic utilizing safety interlock features - manual mode allowing independent control of all operating components. - met current industry standard requirements for safety including the use of EMO (Emergency Off) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. C.2.1 Pre-installation Acceptance Tests - The Contractor shall ensure that the system is fully functional at the Contractor's facility in accordance with the Government's Pre-installation Acceptance Tests as follows: C.2.1.1. Demonstrate that the RTA or RTP system meets specifications as described in the salient characteristics, which includes wafer handling, thermal processing temperatures, ramp rates, temperature uniformity, gas line configuration, and computer control. C.2.1.2. Demonstrate that the RTA or RTP system is operationally functional, which includes: a. Substrate handling, queuing, and processing for at least 200 wafers (100mm in diameter) b. Temperature uniformity by processing 25 wafers coated with titanium in oxygen ambient to convert titanium to titanium dioxide. Final films to be measured by ellipsometry to verify across wafer uniformity and wafer-to-wafer uniformity. Ti coated wafers supplied as Government Furnished Property (GFP). c. Temperature range of operation of at least 300 degrees Celsius to 900 degrees Celsius d. Temperature heating ramp of at least 100 degrees Celsius per second C.2.2 Pre-installation Acceptance Tests Report - The Contractor shall submit a pre-installation acceptance tests report to the Contracting Officer Representative (COR) outlining the results of the acceptance tests. The COR will review and approve the acceptance test report within one (1) week of receiving the results and based on the results will authorize delivery of the RTA or RTP system. C.2.3 Delivery and Installation - The Contractor shall deliver and install the RTA or RTP system to the Army Research Laboratory, 2800 Powder Mill Road, Building 207, Room 3B-41 within eighteen (18) weeks of receiving approval of the acceptance test report from the COR C.2.4 Post-installation Acceptance Tests - The Contractor shall ensure that the RTA or RTP system is fully functional after the system has been installed in room 3B-41 at ARL using the following Government created acceptance tests: C.2.4.1. Demonstrate that the RTA or RTP system meets base specifications as described in C.2, which includes wafer handling, thermal processing temperatures, ramp rates, temperature uniformity, gas line configuration, and computer control. C.2.4.2. Demonstrate that the RTA or RTP is operationally functional, which includes: a. Substrate handling, queuing, and processing for at least 200 wafers (100mm in diameter) b. Temperature uniformity by processing two batches of 25 wafers coated with titanium in oxygen ambient to convert titanium to titanium dioxide. Final films to be measured by ellipsometry to verify across wafer uniformity and wafer-to-wafer uniformity. Ti coated wafers supplied as GFE. c. Temperature range of operation of at least 300 degrees Celsius to 900 degrees Celsius d. Temperature heating ramp of at least 100 degrees Celsius per second e. Crystallization of PZT thin films on PT coated substrates. Non-crystallized PZT coated substrates to be supplied as GFP. The Government shall complete verification via x-ray diffraction. C.2.5 Post-installation Acceptance Tests Report - The Contractor shall submit a post-installation acceptance test report to the COR outlining the results of the acceptance tests. The COR will approve the post installation acceptance test report within one (1) week of receiving the results. C.2.6 Operator and Maintenance Training - The Contractor shall provide two (2) days of on-site operator and maintenance training for eight (8) participants following the installation of the RTA or RTP system at the US Army Research Laboratory (ARL) in Adelphi, MD. The Contractor shall ensure the training occurs within one (1) month of receiving post installation acceptance test report approval from the COR. C.2.7 Troubleshooting - The Contractor shall respond to service call(s) (via email or telephone) and provide access via email or telephone to a technical support person to answer questions regarding tool operation, hardware troubleshooting and basic equipment operation and maintenance within 48 hours. C.2.8 Warranty - The Contractor shall provide a warranty for one (1) year beginning the first day of approval of the post-installation report as defined in C.2.5. The warranty shall include all labor, parts (excluding consumable parts and materials) including shipping, and travel to return the non-functional RTA or RTP system to the operational acceptance test specifications in Section C.2.4. C.3 DELIVERABLES C.3.1 The Contractor shall provide two (2) complete sets of electrical diagrams and operating manuals written in English at time of installation and delivery. The Contractor shall ensure that one (1) of the two (2) manuals provided is on clean room paper. C.3.2 The Contractor shall ensure that the software provided is current with a 2011 year of production. C.3.3 The Contractor shall deliver equipment within twenty (20) weeks of contract award. C.4 OPTIONAL ACCESSORIES (CLIN 0002): The Contractor shall price each option below separately. C.4.1 Closed loop water chiller to supply constant supply of chilled processed water to the RTA/RTP system C.4.2 Spare parts kit including but not limited to quartz tube, quartz tray, thermocouple (TC) wafer, ceramic end effectors for robotic handler, and o-rings. The Contractor shall ensure the spare parts kit consists of items such as subject to relatively rapid ware such as would be provided to customers operating the equipment in a 24 hour, seven (7) days a week environment. C.4.3 A quartz tube with integrated quartz liner compatible with an AG Associates 610 C.4.4 A quartz liner for aforementioned quartz tube compatible with an AG Associates 610 (vii) Delivery is required by eight (8) weeks from date of award. Delivery shall be made to US Army Research Laboratory, Adelphi Laboratory Center, 2800 Powder Mill Road, Building 102, Receiving Room, Adelphi, MD 20783-1197. Acceptance shall be performed at the same location. The FOB point is Destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: none. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Failure to provide adequate information may result in being "non compliant" and not considered for award. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include three (3) records of "Similar" sales from the previous 24 months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Failure to provide adequate information may result in being "non compliant" and not considered for award. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, 52.2.212-3 Alt I Offer Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: none. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3, Gratuities (April 1984), 52.203-6, Restrictions on Subcontractor Sales to the Government - Alternate 1 (Sept 2006), 52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (July 2010), 52.209-6, Protecting the Government's Interest when Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment (Dec 2010), 52.219-6, Notice of Total Small Business Set-Aside (June 2003), 52.219-8, Utilization of Small Business Concerns (May 2004), 52.219-14, Limitations on Subcontracting (Dec 1996), 52.219-28, Post Award Small Business Program Representation (Apr 2009), 52.222-3, Convict Labor (June 2003), 52.222-19, Child Labor-cooperation with Authorities and Remedies (Jan 2006), 52.222-21, Prohibition of Segregated Facilities (Feb 1999), 52.222-26, Equal Opportunity (Mar 2007), 52.222-35, Equal Opportunity for Veterans (Sept 2010), 52.222-36, Affirmative Action for Workers with Disabilities (Oct 2010), 52.222-37, Employment Reports on Veterans (Sept 2010), 52.222-40, Notification of Employee Rights (Dec 2010), 52.223-18, Contractor Policy to Ban Text Messaging While Driving (Sept 2010), 52.225-13, Restrictions on Certain Foreign Purchases (June 2008), 52.232-33, Payment by Electronic Funds Transfer - Central Contractor Registration (Oct 2003), 252.203-7000, Requirements Relating to Compensation of Former DoD Officials (Jan 2009), 252.225-7001, buy American Act and Balance of Payments Program (Jun 2005), 252.225-7012, Preference for Certain Domestic Commodities (Jan 2007), 252.232-7003, Electronic Submission of Payment Requests (Mar 2007), 252.243-7002, Requests for Equitable Adjustment (March 1998), 252.247-7023, Transportation of Supplies by Sea (May 2002), 252.247-7024, Notification of Transportation of supplies by Sea (Mar 2000). (xiii) The following additional contract requirement(s) or terms and conditions apply: 52.225-25, Prohibition on Engaging in Sanctioned Activities Relating to Iran - Certification, 252.204-7003, Control of Government Work Product (April 1992), 252.211-7003, Item Identification and Valuation (Aug 2008), 252.211-7003 Item Identification and Valuation (Aug 2008), Alternate 1, 252.247-7022, Representation of Extent of Transportation by Sea (Aug 1992), ARL-G.032-4418 Tax Exemption Certificate, ARL-H.011-4401, Receiving Room Requirements - ALC (Sep 1999), ARL-WAWF-FFP, ARL-H.005-4401 Release of Information, ARL-H.011-4401, ARL-H.037-4402 Vehicle Registration, ARL-H.037-4403 Work Hours, ARL-H.037-4404 Identification of Employees, ARL-H.046-4401 Key Personnel, ARL.L.037-4410, CMR Clin Instructions (Jul 2010) RDECOM CC 001-10 Accounting for Contracting Services (Jul 2010), ARL-L.40, AMC Level Protest Program (Apr 2006) and ARL-L41, US Army RDECOM Contracting Center - Adelphi Website (Oct 2006) (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as N/A. (xv)The following notes apply to this announcement: none (xvi) Offers are due on April 12, 2011, by 11:59 pm, to barbara.deschepper@arl.army.mil (xvii) For information regarding this solicitation, please contact Barbara Deschepper, Contract Specialist by e-mail; barbara.deschepper@arl.army.mil
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- Place of Performance
- Address: RDECOM Contracting Center - Adelphi (RDECOM-CC) ATTN: AMSRD-ACC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN02417893-W 20110407/110405235301-48448eccf9a3b5d1af77c8314b46960d (fbodaily.com)
- Source
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