MODIFICATION
66 -- Metal Liftoff Tool
- Notice Date
- 4/25/2011
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-11-RQ-0202
- Archive Date
- 5/20/2011
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
paula.wilkison@nist.gov, todd.hill@nist.gov
(paula.wilkison@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- The purpose of this amendment is to answer questions posed by a potential quoter: Question 1. Please clarify NIST's definition of "safe handling" related to delivery and recovery of chemicals? Is pouring of chemicals permitted within the Nanofab and if not, please clarify how the chemicals will be presented to the metal liftoff tool? (We are assuming the Nanofab does not have bulk delivery capabilities for solvents.) Answer 1. Pouring of chemicals is permitted and tool storage tank fill points should be easily accessible, unobstructed and provide a large enough opening for filling without spilling any chemical. Drain points should be valved, easily accessible and provide a flexible open-ended drain line 2-3 ft long. Question 2. Does the Nanofab facility have its own solvent drain system or do we need to include pricing for a waste chemical collection system in our proposal? Answer 2. Per the specification, all chemicals should be recirculated back to the storage tank. Question 3. Is manual loading/unloading and transfer of the wafers expected? Answer 3. Yes, there is no requirement for cassette to cassette processing. Question 4. The requirement states " the tool shall support a spray solvent liftoff process". Does this mean ONLY spray processes will be considered, or does it mean a spray process combined with other methods (immersion, agitation, ultrasonics, etc) would also be desirable? Metal liftoff typically requires a variety of methods to be effective, and in a mixed-used fab such as we understand the Nanofab to be, a wider variety of processing techniques will likely prove more valuable than a single technique configuration. Answer 4. The tool should be a spray solvent liftoff process only. The NanoFab is already equipped with a variety of immersion processing equipment. Question 5. Is it correct for us to assume precious metals may be lifted off from time to time (as is typically the case with metal liftoff processing). If the answer is yes, we are somewhat surprised by the lack of requirement for a reclamation system to allow recapture and reprocessing of these expensive materials. Answer 5. All chemicals will be recirculated back to the storage tank and metals will be reclaimed from there. Question 6. Relative to the "4 solvents" referenced in the "Stronger consideration..." section: a. Will all 4 be different chemicals? Response: Yes, there may be 4 different chemicals b. What temp range is required for each? Response: Per the specification, all chemicals may be heated to 75C. c. Will each waste chem be allowed to drain into a single collection point or will dedicated collection connections be required? Response: A single collection point is acceptable provided there is a mechanism to prevent two tanks draining at one time. d. Are dedicated rinse tanks required for each of the 4 solvents? Response: There should be a single spray type DI water rinse. e. If the answer to (5) above is "yes", will dedicated recapture systems be required for each solvent? Response: N/A Question 7. For the processing of the wafer pieces down to 1" square, will this type of processing typically occur as single pieces or is batch processing required as well for these smaller pieces? Answer 7. Batch processing is desirable although not required. All terms and conditions of the original solicitation, including closing date and time, remain unchanged and in full effect.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-11-RQ-0202/listing.html)
- Place of Performance
- Address: TBD, United States
- Record
- SN02432160-W 20110427/110425234040-305f79d1dec4e11d1aa364910289ba51 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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