MODIFICATION
66 -- Metal Liftoff Tool
- Notice Date
- 4/25/2011
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-11-RQ-0202
- Archive Date
- 5/20/2011
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
paula.wilkison@nist.gov, todd.hill@nist.gov
(paula.wilkison@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- The purpose of this amendment is to answer questions posed by a potential quoter. Question 1. Is it intended that all solvents drain back to their respective supply tank or to a single tank to be used for all solvents as a drain receiver. Answer 1. As stated in the specification, each solvent will be recirculated back to its respective supply tank. Question 2. Is it intended that the DIW used for the spray rinse be drained to a facility drain or the common solvent/DIW drain. Answer 2. As stated in the specification, the DI water will drain to the NIST house acid drain system. Question 3. It is difficult to understand precisely the desire for batch processing. I am assuming that it means a spinner be provide that spins a batch of wafers simultaneously usually done in batches of up to 25 in a cassette like wafer receiver, is that what is wanted to do a batch. How many wafers/pieces constitute a suitable batch. It would be helpful to clarify the hoped for benefit of processing a "batch". Answer 3. We would expect any whole wafer batch processing use industry standard wafer carriers such as 25 wafer cassettes. A custom carrier solution may be required to accommodate wafer pieces. A suitable batch size is a minimum of 6 wafers and/or pieces. All terms and conditions of the original solicitation, including closing date and time, remain unchanged and in full effect.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-11-RQ-0202/listing.html)
- Place of Performance
- Address: TBD, United States
- Record
- SN02432161-W 20110427/110425234041-2b5c7a7528e92fa39a692b163d30f074 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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