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FBO DAILY ISSUE OF MAY 28, 2011 FBO #3472
SOLICITATION NOTICE

66 -- Wafer Probe Station

Notice Date

5/26/2011
 

Notice Type

Combined Synopsis/Solicitation
 

NAICS

334515 — Instrument Manufacturing for Measuring and Testing Electricity and Electrical Signals
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

SB1341-11-RQ-0257
 

Archive Date

7/15/2011
 

Point of Contact

Joni L Laster, Phone: 301-975-8397, Todd D Hill, Phone: 301-975-8802
 

E-Mail Address

joni.laster@nist.gov, todd.hill@nist.gov
(joni.laster@nist.gov, todd.hill@nist.gov)
 

Small Business Set-Aside

Total Small Business
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-51. The associated North American Industrial Classification System (NAICS) code for this procurement is 334515 with a small business size standard of 500 employees. This acquisition is 100% set-aside for small business. The National Institute of Standards and Technology (NIST) has a requirement for a probe station to position electrical probes for DC characterization of magnetic nanostructures on wafers. Four DC contacts are required for electrical measurements. Refurbished and or remanufactured equipment shall not be considered for award. Quoters must submit all questions concerning this solicitation in writing to joni.laster@nist.gov. Questions should be received no later than 7 calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. All responsible quoters shall provide a quotation for the following line item: LINE ITEM 0001: Quantity one (1) each, Wafer Probe Station that shall meet or exceed the following required specifications: Technical Specifications: (A) Electrical probing specifications: 1. The sample stage shall be equipped to accommodate partial wafers as small as 3 mm diameter and full wafers up to 100 mm (4 inch) diameter. 2. The stage shall be equipped with a vacuum chuck to fix the wafer to the sample stage. 3. The vacuum shall be provided by a quiet vacuum pump and controlled by a vacuum toggle switch. The pump shall be powered by 115 VAC, 60 Hz, provide a vacuum within the range of 30 - 35 kPa, and produce no more than 40 dB sound pressure level at 1 m. 4. The vacuum chuck surface shall be metallic and electrically isolated from ground. 5. A steel platen shall be provided on which to mount at least six and no more than 10 magnetic-base probe micropositioners. 6. The platen shall have a coarse and fine lift system to allow for rapid wafer repositioning. The coarse motion shall be controlled by a lever that raises the probes by at least 2 mm. The fine motion shall be controlled by a knob that allows continuous vertical adjustment. 7. The sample stage shall have a lateral (X-Y) range of motion of 4" X 4" to allow probing of anywhere on the wafer surface. This motion shall be controlled by a compound coaxial knob (as found on microscope stages) to allow simultaneous X-Y motion. The mechanical ratio of the knob rotation to linear travel shall allow the operator to pass the platen lift acceptance test described below under Inspections and Acceptance. 8. The probe station shall include a 2" by 2" microscope stage to allow for independent lateral movement of the stereo zoom microscope. (B) Sample imaging specifications: 1. The probe station shall include a stereo zoom microscope. 2. The microscope shall include two 10X eye pieces. 3. The zoom range shall allow an overall magnification from no less than 7X to at least 50X. Preference shall be given for more than 50X maximum overall magnification. 4. The working distance shall be greater than 100 mm. Preference shall be given for more than 100 mm working distance. 5. The microscope shall include a trinocular head with a port for attachment of a CCD camera. 6. The microscope shall be equipped with a digital camera with USB 2.0 connection for image acquisition. The camera resolution shall be at least 3 megapixels. Preference shall be given for more than 3 megapixel resolution. 7. The sample stage shall be illuminated at minimum using a fiber optic ring with light pipe and incandescent light source. Preference shall be given for LED-based light source with both ring and coaxial illumination. (C) Facility Requirements Specifications: 1. The probe station shall require a footprint no wider than 30" wide, 25" deep, and 25" height. Preference shall be given for systems smaller than these dimensions. 2. The probe station system shall weigh no more than 150 pounds. Warranty: The Contractor shall provide, at a minimum, a one year warranty for the equipment. The Contractor shall state the warranty coverage for the equipment. Inspection and Acceptance: In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, at the Contractor's expense. The platen lift system must pass the following acceptance test upon delivery and setup: a. The test will be run on a 4" wafer provided by NIST's technical representative. The wafer will contain resistors with four contact pads, each 300 um square. The vendor may provide a test wafer pending approval by NIST's technical representative. b. Position four probes to make a 4-wire resistance measurement of a sample device on a 4" wafer with the platen in the normal position. Run the measurement. c. After completion of measurement, lift the platen and move the sample wafer to address a new identical device at least 1" away from the previous device. d. Lower the platen to make contact to the device. Visually confirm that all four probes have maintained registry on their respective pads and require no individual adjustments. Run the measurement. e. Repeat steps c. and d. ten (10) times. The requirement to pass acceptance is at least 9 out of 10successful measurements. Delivery shall be within 6 weeks from receipt of an order. Delivery terms shall be FOB Destination. Delivery terms shall be FOB Destination. The contractor shall deliver to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. (See 52.212-4(j). Evaluation Criteria: The Government will award a purchase order resulting from this solicitation to the responsible quoter whose quotation, conforming to the solicitation, results in the best value to the Government, price and other factors considered. The following will be used to evaluate quotations: Technical Capability and Price. Technical Capability shall be more important than price. In determining best value, preference shall be given to equipment that is capable of exceeding the minimum specifications of those stated above in specifications B (3), (4), (6) & (7) and C(1). If all quotations are determined to be technically equal; price shall be the determining factor. Technical Capability: Evaluation of Technical Capability shall be based on the documentation provided in the quotation. Technical descriptions and product literature submitted shall be evaluated to determine that the proposed systems meet or exceed the minimum specifications stated herein. Note: If an offeror does not indicate whether its proposed equipment meets a certain technical requirement, NIST will determine that it does not. Price: Price shall be evaluated for fairness and reasonableness. The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: 52.219-6, Notice of Total Small Business Set-Aside; 52.219-28 Post-Award Small Business Program Re-Representation; 52.222-3, Convict Labor; 52.222-19 Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52-222-26, Equal Opportunity; 52.222-36, Affirmative Action for Workers with Disabilities; 52.225-1 Buy American Act - Supplies; 52.223-18, Contractor policy to ban text messaging while driving; 52.225-13 Restriction on Certain Foreign Purchases; 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses all line items; 2) For the purpose of evaluating technical capability: Technical description and/or product literature which clearly details the manufacturer, make and model of the proposed product(s), addressed all required specifications, and clearly documents that the offered product(s) meet(s) or exceeds the specifications stated herein. 3) Description of commercial warranty; 4) A current copy of the Contractor's price list or catalog pages that contain pricing for the equipment/services defined within the Contractor's quotation; 5) This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR The offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. All quotes shall be received not later than 3:00 PM local time, on June 10, 2011 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B125, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Joni Laster. E-mail quotes ARE acceptable. Fax quotes will NOT be accepted. Quotations shall not be deemed received by the Government until the entire quotation is entered into the e-mail address inbox set forth above.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-11-RQ-0257/listing.html)
 

Place of Performance

Address: 100 Burea Drive, Gaithersburg, Maryland, 20899, United States

Zip Code: 20899
 

Record

SN02458696-W 20110528/110526235456-c30d2948f646f248fc4481bb76f0c567 (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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