SOLICITATION NOTICE
66 -- Deep Silicon Etcher - Contracting POC: Ashley Wilson
- Notice Date
- 11/23/2011
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- ACC-APG SCRT - Adelphi, ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX12T0028
- Response Due
- 12/23/2011
- Archive Date
- 2/21/2012
- Point of Contact
- Catherine K. McKenna, 301-394-4347
- E-Mail Address
-
ACC-APG SCRT - Adelphi
(cayti.mckenna@us.army.mil)
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. NOTE: THE SOLE POC FOR ALL MATTERS REGARDING THIS SOLICITATION IS ASHLEY WILSON, ashley.t.wilson.civ@mail.mil, 301-394-1945. (ii) The solicitation number is W911QX-12-T-0028. This acquisition is issued as an RFQ Competitive Solicitation. (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-33 dated 4 August, 2011 (iv) This acquisition is set-aside for Small Business Set Aside. The associated NAICS code is 333295. The small business size standard is 500 employees. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable) CLIN 0001, Deep Silicon Etcher in accordance with the attached Salient Characteristics, 1 EACH (vi) Description of requirements: Deep Silicon Etcher (DSE): Table one (1): Substrate sizes to be processed: Wafer Diameter (mm)Thickness Range (um)ConfigurationCommon Materials 100mm200um-1000umSEMI standard flatsSilicon 150mm300um-1000umSEMI standard flats or notchSilicon 200mm400um-1000umSEMI standard flats or notchSilicon Table two (2): Etch requirements: Trench Width (Microns)Aspect RatioSidewall Roughness (nanometers)Etch Rate (Microns per minute) 0.520:1Less than50Greater than 1 440:1Less than 500Greater than 3 The Contractor shall ensure that the DSE: -consists of a vacuum chamber, load lock, pumping system, inductively coupled plasma and bias Radio Frequency power supplies, temperature controlled electrostatic chucks, fast-capable of Bosch process cycle times from eight hundred milliseconds to ten seconds-gas switching and a control computer. -is newly constructed. -meets the etch requirements listed in table two (2). -meets current industry standard requirements for safety as regulated by the Occupational Safety and Health Administration (OSHA) and National Electrical Safety Code including the use of EMO (Emergency Off) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. -has signage denoting the hazards present-electrical, thermal and mechanical. -comes with a spare parts kit consisting of consumable-replaced within six (6) months of continuous operation-items. -comes with two (2) complete sets of schematics (including electrical diagrams) and two (2) complete operating manuals written in English with one (1) manual printed on clean room paper, and a digital copy in Portable Document Format (PDF). -Price includes shipping costs that include insurance and any customs fees. -includes three (3) days-twenty four hours total-of operation and maintenance training. The Contractor shall ensure that the vacuum chamber within the DSE: -accommodates loading of the substrate sizes listed in table one (1). -is stainless steel and aluminum construction. -includes a gas mixing manifold. -includes vacuum gauges, atmospheric and process limit switches. -includes the substrate electrode and inductively coupled plasma source antenna. The Contractor shall ensure that the load lock system within the DSE: -is capable of loading substrates of the sizes listed in table one (1). The Contractor shall ensure that the pumping system within the DSE: -consists of a turbomolecular chamber pump with dry backing pump suited for corrosive duty, and a separate load lock pump capable of pumping down the load lock in less than five (5) minutes. The Contractor shall ensure that the inductively coupled plasma and bias RF power supplies within the DSE: -includes a one hundred watt (100W) digital bias power supply with a frequency range of one kilohertz to one megahertz (1kHz-1MHz) with automatic impedance matching unit. -includes a two megahertz (2MGHz) five kilowatt (5kW) high power supply with solid state impedance matching network. The Contractor shall ensure that the temperature controlled electrostatic chuck within the DSE: -is capable of clamping substrates of all the sizes listed in table one (1). -is capable of controlling substrate temperature between -20 to +40 degrees Celsius under normal etch conditions. -incorporates helium backside cooling. -includes the electrostatic clamping power supply. The Contractor shall ensure that the fastgas switching system within the DSE: -is capable of Bosch process cycle times from eight hundred milliseconds to ten seconds. -is capable of low pressure transient (less than twenty percent) process gas switchover. The Contractor shall ensure that the control computer within the DSE: -is capable of running Bosch process Silicon etching. -includes process control software that has routines to enable continuous process morphing as a function of etch time, and is capable of eliminating notching for Silicon etches that terminate on Silicon Dioxide. The Contractor shall ensure that the system operation (with the exception of stand-alone pumps and compressors which can be located in a chase adjacent to the system) is compatible with a class 100 or International Standards Organization (ISO) class five (5) cleanroom. The Contractor shall ensure that the electrical facilities requirements of the Deep Silicon Etcher are based on voltages, frequency and currents commonly used in the United States of America such as 120, 208 240 or 480 Volts. (vii) Delivery is required by US Army Research Laboratory six (6) months after date of contract. Delivery shall be made to US Army Research Laboratory 2800 Powder Mill Road Adelphi, MD 20783. Acceptance shall be performed at US Army Research Laboratory. The FOB point is DESTINATION. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision NONE. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include five (5) records of sales from the previous twelve (12) months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer, or shall provide evidence of current, active ORCA registration. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause NONE. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.204-10, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.223-18, 52.232-33, 252.203-7000, 252.247-7023 ALT III (xiii) The following additional contract requirement(s) or terms and conditions apply: DFARS 252.211-7003, 252.211-7003 ALT I (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as NONE. (xv) The following notes apply to this announcement: NONE (xvi) Offers are due on 12/23/11, BY 11:59PM, Eastern Standard Time, to ashley.t.wilson.civ@mail.mil. (xvii) For information regarding this solicitation, please contact Ashley Wilson, 301-394-1945.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/51d12cc6d56527423b06889fb8cf8e0c)
- Place of Performance
- Address: ACC-APG SCRT - Adelphi ATTN: AMSRD-ACC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN02628615-W 20111125/111123234343-51d12cc6d56527423b06889fb8cf8e0c (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |