SOURCES SOUGHT
66 -- Three Dimensional Optical Profilometer
- Notice Date
- 5/8/2012
- Notice Type
- Sources Sought
- NAICS
- 333314
— Optical Instrument and Lens Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB686040-12-03654
- Archive Date
- 6/6/2012
- Point of Contact
- Tiffany C Atchison, Phone: 3034975534
- E-Mail Address
-
tiffany.atchison@nist.gov
(tiffany.atchison@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- NB686040-12-03654 National Institute of Standards and Technology (NIST) Acquisition Management Division Sources Sought for Commercial Item Purchase The National Institute of Standards & Technology (NIST) seeks information on vendors that are capable of providing three dimensional optical metrology capabilities for a variety of thin film samples at sub-micrometer resolution. An optical microscope capable of determining precise lateral and height dimensions of such samples is required. The microscope should employ either white-light interferometry, confocal laser scanning microscopy, or both to create three dimensional scans of samples with the ability to discern a 20 nm step in height and lateral dimensions of 350 nm. In addition, the microscope should have the ability to take a true color image of the sample of interest. The microscope should have a turret capable of holding at least 4 microscope objectives. These microscope objectives should be parfocal with each other. The microscope should be capable of bright -field, dark-field (oblique illumination) reflected light imaging. The objective selection (turret position) should be motorized as should the stage position. In addition, all contrast mechanisms available on the microscope should be listed. Only new products should be considered. No refurbished or used products will be considered. HEIGHT RESOLUTION: The microscope should be capable of measuring a thin film step height of 20 nm with a repeatability of at least 20 nm (one standard deviation) for a reflective thin film of lateral dimensions 1 um x 1 um. In addition, the maximum measurable height should be at least 7 mm, as configured. Special considerations will be given for products exceeding this level of height resolution or products capable of accurately measuring height on features having lateral dimensions smaller than 0.35 um x 0.35um. LATERAL RESOLUTION: The microscope should have the ability to measure lateral dimensions of a reflective film with a resolution of at least 350 nm with a repeatability of 20 nm or smaller (three standard deviations). Lateral resolution is more important than height resolution in consideration of solutions. TIME OF ACQUISITION: An image of resolution of 640 x 480 pixels on a reflective substrate should be acquired in less than 270 seconds. Time of acquisition at a given resolution should be provided. OBJECTIVES: 1. One low magnification objective (10x or lower), With numerical aperture (NA) between.075-.3, a field of view between 10 mm x 10mm and 1 mm x 1mm 2. Two moderate magnification objectives ( 20x, 50x), with numerical apertures (NA) between.4 and.95, and fields of view between 0.5 mm x 0.5mm and 0.1 mm x 0.1mm 3. One high magnification objective (100x or greater), with numerical aperture (NA) between.8 and.98 and field of view between 0.1 mm x 0.1 mm and 0.05 mm x 0.05 mm STAGE REQUIREMENTS: 1) The sample stage should be fully automated with a x, y translation of at least 70 mm, and be capable of accepting at least a 100 mm (4") diameter round sample. The stage should move with a reproducibility of +- 1 um and an accuracy of +- 3 um. All accessories needed to control the stage either through software (mouse control) or external hardware (external joystick should be included. SOFTWARE: The microscope will be used by a variety of scientists and software usability is a key concern. The software used to operate the microscope must also be capable of creating three dimensional maps. Software should be capable of measuring surface roughness of an area or line of interest. The software should be able to create a "stitched" or "mosaic" image composed of several images of high resolution, creating a field of view exceeding that of a single objective. The software should capable of exporting images in one of the following electronic formats; tagged image format (tiff), portable network graphic format (png), or Joint Photographic Experts Group (jpg). Additionally, any software upgrade required to measure the thickness of thin transparent films or surfaces under such films should be included. The software should be Windows compatible (XP or Windows 7). ADDITIONAL EQUIPMENT: The contractor will need to include all software and hardware accessories required for a fully functional system including a control computer and all interfacing hardware. TRAINING AND INSTALLATION: Operations training and instrument training will need to be provided. All user documentation will need to be provided. This announcement is not a Request for Proposals (RFP) and does not commit the Government to award a contract now or in the future. No solicitation is available at this time. The purpose of this synopsis is to identify organizations with the requisite qualifications to meet the requirements of the item stated herein. After results of this market research are obtained and analyzed and compared with NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a contract. If at least two qualified small businesses are identified during this market research stage, then this acquisition may be solicited as a small business set aside. NIST is seeking responses from all responsible sources, including large and small businesses (SB, SDB, WOSB, HUBZone, SDVOSB and VOSB). This requirement is assigned a NAICS code of 333314 - Optical Instrument and Lens Manufacturing, with a small business size standard for such requirements of 500 employees. The specific purpose of this Sources Sought Announcement is to determine if there are small businesses, within the parameters identified above, that are capable of providing the item identified herein. Interested business organizations that believe they are capable of meeting the requirement should submit electronic copies or mailed copies of their capability statement. Please limit responses to ten (10) pages or less. Responses should include the following information: 1. Name of company that will provide the items detailed above. 2. Name of company that will fabricate the microscope. 3. Spec sheets and examples of prior provision of this type of item, addressing the criteria identified above and in the attached specifications. 4. Typical number of similar items produced per year and typical time to deliver the items. 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Any proprietary information should be so marked. The written capability statement should be received by the Contracting Officer no later than May 22, 2012. The capability statement shall identify the business status of the organization. Only electronic or mailed statements will be accepted. Faxes will not be accepted. Send to Tiffany Atchison, Contract Specialist, at tiffany.atchison@nist.gov. Direct all questions to this e-mail.
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