SOLICITATION NOTICE
66 -- NB620010-12-03554 RGA for Oxford ALD
- Notice Date
- 5/30/2012
- Notice Type
- Presolicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB620010-12-03554
- Archive Date
- 6/27/2012
- Point of Contact
- Eric Bubar, Phone: 3019753635
- E-Mail Address
-
eric.bubar@nist.gov
(eric.bubar@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards and Technology (NIST) Acquisition Management Division, on behalf of the Center for Nanoscale Science & Technology (CNST), intends to negotiate with Oxford Instruments America, Inc.; Concord, MA, on a sole source basis under the authority of FAR Subpart 13.106-1 (b), Soliciting from a Single Source, to purchase a residual gas analyzer (RGA) for an Oxford Instruments atomic layer deposition (ALD) tool. The CNST NanoFab is a state-of-the-art nanofabrication laboratory which utilizes an atomic layer deposition (ALD) tool for conformal thin film coating on high aspect nano-structures or inside nano-porous materials. ALD is a chemical precursor reaction based self-limiting coating process. To control and explore chemical reactions in plasma and thermal ALD processes, an in-situ monitor to "watch" the precursor, water and other chemicals during the process is necessary. The CNST NanoFab has a need for a residual gas analyzer (RGA), which is a small mass spectrometer designed for process control and chemical contamination monitoring in vacuum systems, that must be compatible with an Oxford Instruments ALD that NIST previously purchased. ALD coating is a paused process and each step time is very fast (typically in milliseconds). This RGA should be able to monitor one different mass every ALD cycle to build a complete picture of all the reaction species. Therefore, RGA software should know when our ALD starts a new cycle and operate RGA to match the ALD cycle time. Recent market research, including a sources sought notice posted on FedBizOpps, performed by NIST shows that Oxford Instruments America, Inc. is the sole provider of an RGA that is compatible with the Oxford Instruments ALD that NIST previously purchased. The NAICS Code is 334516- Analytical Laboratory Instrument Manufacturing with a Size Standard of 500 employees. NIST anticipates negotiating and awarding a firm-fixed-price purchase order to Oxford Instruments America, Inc. for this requirement. Interested parties that believe they could satisfy the requirements listed above for NIST may clearly and unambiguously identify their capability to do so in writing on or before the response date for this notice. This notice of intent is not a solicitation. Information submitted in response to this notice will be used solely to determine whether competitive procedures could be used for this acquisition. Any questions regarding this notice must be submitted in writing via email to Eric Bubar at eric.bubar@nist.gov. All responses to this notice of intent must be submitted so that they are received at eric.bubar@nist.gov no later than June 12, 2012 at 5:00 pm. Contracting Office Address: 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640 Gaithersburg, Maryland 20899-1640 Place of Performance: 100 Bureau Drive Gaithersburg, Maryland 20899 United States Primary Point of Contact: Eric Bubar, Contract Specialist eric.bubar@nist.gov Phone: 301-975-3635 Fax: 301-975-8904
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB620010-12-03554/listing.html)
- Record
- SN02761510-W 20120601/120531000019-1a4e7d7f50a1e77efae9291d6f0d63c6 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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