MODIFICATION
66 -- High Density Plasma Enhanced Chemical Vapor Deposition (HD-PECVD) System
- Notice Date
- 8/8/2012
- Notice Type
- Modification/Amendment
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-12-RP-0088
- Archive Date
- 10/31/2012
- Point of Contact
- Joni L Laster, Phone: 301-975-8397, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
joni.laster@nist.gov, patrick.staines@nist.gov
(joni.laster@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- This amendment is being issued to address vendor questions and answers as follows: Question: Does NIST have the intent to not connect the requirement for helium backside cooling with the "no kit - no open" substrate change requirement? Answer: NIST expects helium backside cooling to be available for all whole wafer processes. The due date/time remains unchanged. All respones shall be provided not later than 3pm EST on August 15, 2012.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-12-RP-0088/listing.html)
- Place of Performance
- Address: 100 BUREAU DRIVE, GAITHERSBURG, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02832155-W 20120810/120809001357-917454bed08e9c58449029fa261e8b71 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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