SOLICITATION NOTICE
R -- NOTICE OF INTENT TO SOLE SOURCE: Atom Based Dimensional Metrology
- Notice Date
- 2/7/2013
- Notice Type
- Presolicitation
- NAICS
- 541990
— All Other Professional, Scientific, and Technical Services
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- NB683020-13-01390
- Archive Date
- 3/8/2013
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
paula.wilkison@nist.gov, todd.hill@nist.gov
(paula.wilkison@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The Department of Commerce, National Institute of Standards and Technology (NIST), intends to negotiate a firm fixed price purchase order, on a sole source basis, with the University of Maryland of College Park, Maryland for atom based dimensional metrology services utilizing NIST's Omicron UHV-STM system under other than full and open competition by the authority of FAR subpart 6.302-1: Only one responsible source and no other supplies or services will satisfy agency requirements. NIST provides technological leadership to nanotechnology manufacturing and other government agencies by developing the methods, tools, and artifacts needed for the development of nanometer scale and atomic-resolution dimensional measurement. The focus is to assist the metrology needs of advanced nanolithography needs for nanotechnology manufacturing. One goal is to develop techniques and standards needed to make dimensional measurements on wafers with features whose dimensions are based on atomic counting methods. The atom-based dimensional metrology project is developing methods to fabricate structures on the near atomic scale whose dimensions can be measured and traced directly to the intrinsic crystal lattice. These samples are intended to be dimensionally stable and allow transfer to other measurement tools which can measure the artifacts with dimensions known on the sub-nanometer scale. This work requires significant expertise and understanding of the surface preparation, hydrogen termination, and patterning physics of silicon surfaces to enable repeatable sample preparation and the development of nanometer scale surface lithography, in addition to the development of atomic scale silicon surface patterning and silicon depassivation and oxidation. The requirement for the development of methods and fabrication elements to conduct this work was originally competed via full and open competition in 2011. The resultant order was awarded to the University of Maryland (SB1341-11-SE-1353). As a result of the work performed under SB1341-11-SE-1353, the University of Maryland developed hardware and sample processing for the Omicron UHV scanning tunneling systems as well as STM tip preparation and analysis. The UMD also developed a UHV high temperature silicon process that reconstructs the sample into long range atomic order with fiducial marks present. This is an Omicron/NIST specific process developed by UMD personnel under the previous contract. This preparation includes an extensive detailed set of chemical cleaning and preparation steps as well as specific UHV sample loading, transfer and annealing procedures using the specific hardware at NIST on the Omicron STM. The UMD has also developed a unique STM tip preparation and analysis using field ion and field electron analysis of Tungsten tips. This procedure involves STM tip cleaning, FIFEM processing and an extended thermal annealing process specific to the NIST UHV facility. This includes a specific process on the NIST Omicron tip heating station to achieve atomically sharp tips. Detailed depassivation procedures were also developed by UMD personnel. To train a new contractor would require at least 6 months, even if that contractor had extensive experience in UHV STM and silicon surface preparations. It would involve a significant investment in cost and time to complete the training necessary to enable a PhD level contractor to use the UMD developed processing methods. The cost of this training would not be recouped through competition, and the time required for this training (estimated at six months) represents an unacceptable delay. The University of Maryland is the only contractor who can provide the atom based dimensional metrology services that meet NIST's requirements. Therefore, the University of Maryland is uniquely qualified to provide the required atom based dimensional metrology services. Delivery shall be FOB Destination, Gaithersburg, MD, and be completed no later than April 30, 2014. The North American Industry Classification System (NAICS) code for this acquisition is 541990, and the size standard is $14.0M. No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, interested persons may identify their interest and capability to respond to this requirement. The Government will consider responses received by 3:00 p.m. (Eastern) on February 21, 2013. Inquiries will only be accepted via email to paula.wilkison@nist.gov. No telephone requests will be honored. A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB683020-13-01390/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02981931-W 20130209/130207234742-dd712baeac09cfde32945d2e39b5f3c7 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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