SOLICITATION NOTICE
R -- Services: Optical Metrology Support - Statement of Work
- Notice Date
- 8/18/2013
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 541330
— Engineering Services
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-13-RQ-0819
- Archive Date
- 9/17/2013
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Patrick Staines, Phone: (301)975-6335
- E-Mail Address
-
paula.wilkison@nist.gov, patrick.staines@nist.gov
(paula.wilkison@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- Statement of Work for SB1341-13-RQ-0819 Optical Metrology Support THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL SERVICES-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-69, effective August 1, 2013. ***This solicitation is being issued using Simplified Acquisition Procedures. *** 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to the Contracting Officer. Questions should be received no later than five calendar days after the issuance date of this solicitation. All responses to the questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, on the question responses included in the amendment to the solicitation will govern performance of the contract. (end of provision) The associated North American Industrial Classification System (NAICS) code for this procurement is 541330 with a small business size standard of $14.0M. This requirement is a 100% Small Business Set-Aside. Introduction NIST has a requirement for a contractor to provide optical metrology support. Background Optical methods are used widely in semiconductor manufacturing for the measurement of feature dimensions known as critical dimensions (CD) and for defect inspection. Measurement tolerances continue to be reduced and improved measurement uncertainty is required. NIST is developing improved optical modeling methods and hardware techniques to accomplish this. For quantitative analysis, such as for metrology applications, it is essential to have accurate modeling capabilities and high speed measurement algorithms. NIST has a requirement for the development and operation of new optical modeling code that includes front and back end Fourier capability using the finite difference time domain (FDTD) approach and rigorous coupled wave (RCW) approach. This involves code development for the electromagnetic scattering components and the Fourier optical illumination and imaging components through enhancement of Fourier based normalization of the illumination and scattered fields. Simulations using three dimensional models and comparison with the experiments are an essential part of optical defect and critical dimension (CD) metrology. Accurate numerical simulations are an essential requirement for the analysis of experimental results for dimensional measurements. Comparison of FDTD, RCW, and integral equation methods for two and three dimensional models must be carried out to ensure accurate modeling of inherently three dimensional features. The requirement is also for the development of new optical techniques for next generation defect metrology and inspection that use the spatial frequency components of the sample and optical fields. This will include methods that use coherent illumination and interference imaging. The data acquisition and modeling involves spatial frequency analysis and optimization of the illumination and collection optics. This requirement includes rigorous evaluation of scattered light from defects acquired using a modified bright field optical microscope. Theoretical simulations are used to demonstrate observable signatures for defects for logic cells and intentional defect arrays using targets based on highly directional lithography procedures. Advancing these methods using interference microscopy includes using complex reference fields encoded with spatial frequency information. The contractor will operate and develop simulation code running on a parallel multi core processor to evaluate these methods for scatterfield designs and interference microscope designs. This requirement also involves complex statistical methods to combine and optimize various measurement strategies use in optical metrology. Statistical code will be developed to optimize optical microscope and modeling performance at 193 nm and longer wavelengths. Both coherent and incoherent illumination methods need to be evaluated using algorithms for the 193 nm optical instrument. This will include quantitative analysis of 193 nm or similar scatterfield microscope illumination for spatial frequency controlled or interferometric microscopy. The National Institute of Standards and Technology has a requirement for Optical Metrology Support All interested Contractors may provide a quote for the following: Line Item 0001: Scientific Services: Optical Metrology Support, in accordance with the Statement of Work, attached. PROVISIONS AND CLAUSES: The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR clauses may be viewed at http://acquisition.gov/comp/far/index.html. Provisions 52.212-1, Instructions to Offerors-Commercial Items 52.212-3 Offeror Representations and Certifications-Commercial Items 52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran; Offerors shall complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. Clauses 52.212-4 Contract Terms and Conditions-Commercial Items 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items-Commercial Items including subparagraphs: 52.204-10, Reporting Executive Compensation; 52.209-6, Protecting the Government's Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment; 52.209-10, Prohibition on Contracting with Inverted Domestic Corporations; 52.219-6, Notice of Total Small Business Set-Aside; 52.219-28, Post Award Small Business Program Re-representation; 52.222-3, Convict Labor; 52.222-19, Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52.222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Veterans; 52.222-36, Affirmative Action for Workers with Disabilities; 52.222-37, Employment Reports on Veterans; 52.223-18, Contractor Policy to Ban Text Messaging While Driving; 52.225-13, Restriction on Certain Foreign Purchases; 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. 52.204-9 Personal Identity Verification of Contractor Personnel 52.227-14, Rights in Data - General 52.217-8, Option to Extend Services 52.236-13 -- Accident Prevention 52.237-2, Protection of Government Buildings, Equipment, and Vegetation Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. The full text of a CAR provision or clause may be accessed electronically at http://farsite.hill.af.mil/vfcara.htm 1352.201-70 Contracting Officer's Authority; 1352.209-73 Compliance With the Laws; 1352.237-75 Key Personnel 1352.237-73 Foreign National Visitor and Guess Access to Departmental Resources 1352.239-72 Security Requirements for Information Technology Resources 1352.271-83 Government Review, Comment, Acceptance and Approval 1352.237-71 Security Processing Requirements-Low Risk Contracts 1352.246-70 Place of Acceptance (APR 2010) (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract. (b) The place of acceptance will be: NIST 100 Bureau Drive Gaithersburg, MD 20899 Representation by Corporations Regarding an Unpaid Delinquent Tax Liability or a Felony Conviction Under Any Federal Law (Class Deviation) (March 2012) (1) In accordance with Sections 543 and 544 of Public Law 112-55 Commerce, Justice, Science, and Related Agencies Appropriations Act 2012, Title V (General Provisions) none of the funds made available by that Act may be used to enter into a contract with any corporation that- (a) Was convicted of a felony criminal violation under any Federal law within the preceding 24 months, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government. (b) Has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreement with the authority responsible for collecting the tax liability, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government. (2) The Offeror represents that, as of the date of this offer - (a) It is [ ] is not [ ] a corporation that was convicted of a felony criminal violation under a Federal law within the preceding 24 months. (b) It is [ ] is not [ ] a corporation that has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreements with the authority responsible for collecting the tax liability. (End of provision) INSTRUCTIONS: System for Award Management Registration In accordance with FAR 52.204-99 (September 2012) (DEVIATION), the awardee must be registered in the System for Award Management (www.sam.gov) prior to award. Refusal to register shall forfeit award. Due Date for Quotations Offerors shall submit their quotations so that NIST receives them not later than 3:00 p.m. Eastern Time on September 2, 2013. FAX quotations shall not be accepted. E-mail quotations shall be accepted at paula.wilkison@nist.gov. Please reference the RFQ number in the subject line of email communications. Offerors' quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above. Quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Paula Wilkison, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. All Offerors should ensure the RFQ number is visible on the outermost packaging. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Paula Wilkison, Contract Specialist on 301-975-8448. Addendum to FAR 52.212-1, Quotation Preparation Instructions All quoters shall submit the following: 1) one technical quotation that includes Offeror's proposed technical approach as well as one (1) resume each for proposed key personnel, 2) A list of past performance references, and 3) A price quotation which addresses Line Item 0001 organized as indicated below: 1. Technical Quotation Technical Approach and Capability The Offeror shall demonstrate its understanding of the requirements and provide a concise, detailed, and thorough discussion of its approach and capability to fulfilling the requirements of each task in the Statement of Work (SoW). The Offeror shall describe its proposed methods and techniques. Key Personnel/Experience Key Personnel - The Offeror shall provide the resumes of its proposed key personnel that must, at a minimum, meet the qualifications identified in section XIII of the SOW and include a minimum of ten years of specialized experience. Resumes of personnel showing less than 10 years of experience will not be considered for an award. Include a list of past contracts, reports and other documentation that provides objective and documentary evidence of the specialized experience in all tasks. Be sure to include all personnel that will be utilized. The personnel listed in the quotation and incorporated into any resulting contract should remain unchanged for the life of the contract (see Key Personnel). No additions or replacements will be allowed without substantial justification. Each resume shall not exceed three (3) pages. Each resume shall demonstrate the proposed key personnel's ability to perform the role for which they are being proposed and their experience in delivering services in the areas generally described in the SoW. Resumes shall include the following information: • Full name • Education • Chronological work experience • Narrative describing relevance of work experience to current requirement Experience - The Offeror shall describe their experience performing similar work; explain how their experience is relevant to this requirement and how their experience will ensure successful completion of the required tasks. NIST will evaluate the extent of the Offeror's experience providing similar services and will consider the relevance of the Offeror's experience to the current requirement. 2. Past Performance The Offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the Offeror intends to subcontract with another firm(s) for part of this requirement, that firm's past performance information shall also be provided. If the Offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the Offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced. The description of each contract/order described in this section shall not exceed one half page in length. For each contract/order, the Offeror shall provide the following information: 1. Contract number; 2. Description and relevance to solicitation requirements including dollar value; 3. Period of Performance - indicate by month and year the state and completion (or "ongoing") dates for the contract; 4. Reference Contact - If a non-Government contract, identify the name and address of the client with current telephone number and email address of a point of contact of the client responsible for the contract; 5. Contracting Office - If a Government contract (Federal or state), identify the Procuring Contracting Officer (PCO), administrative Contracting Officer (ACO), and Contracting Officer's Representative (COR), and their names, current telephone numbers and email addresses. 6. Problems Encountered - include information regarding information regarding any problems encountered on the contracts described above and corrective actions taken to resolve those problems. 3. Cost/Price The Government contemplates award of a fixed price type purchase order resulting from this solicitation. The Offeror shall specify the fixed price for the requirement detailed in the Statement of Work. Offeror shall propose a payment schedule. This is an Open-Market Combined Synopsis/Solicitation for services as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The Offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR The Offeror shall state "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an Offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the Offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. QUOTATION EVALUATION: Evaluation Factors: Award shall be made to the Offeror whose quotation offers the best value to the Government price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability 2) Past Performance, and 3) Price. All non-price factors, when combined, are approximately equally important to price. Technical Capability: Technical Approach Government will evaluate the Offeror's technical approach and capability to conducting the requirements of each task in the SOW to determine its overall understanding of the requirements and the extent to which its proposed approach will ensure successful performance of this effort. Qualifications / Experience Key Personnel - The Government will evaluate the extent to which the resumes submitted for the Offeror's proposed key personnel demonstrate that they have appropriate education, qualifications, and experience to efficiently and effectively manage and perform the requirements and ensure the technical quality of deliverables. Experience - The Government will evaluate the extent of the Offeror's experience providing similar services. NIST will give preference to Offerors who demonstrate they have experience delivering the same type of services they are proposing for the current requirement. Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the Offeror has successfully completed relevant contracts in the past five years. In assessing the Offeror's past performance information, NIST will evaluate, as appropriate, successful performance of contract requirements, quality and timeliness of delivery of goods and services, cost management, communications between contracting parties, proactive management and customer satisfaction. Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the Offeror's past performance. The Government will assign a neutral rating if the Offeror has no relevant past performance information. Price: The Government will evaluate price for reasonableness. Past Performance and Price shall not be evaluated on quotes that are determined technically unacceptable under the Technical Capability Evaluation factor. 1352.233-70 AGENCY PROTESTS (APR 2010) (a) An agency protest may be filed with either (1) the Contracting Officer, or (2) at a level above the Contracting Officer, with the agency Protest Decision Authority. See 64 Fed. Reg. 16,651 (April 6, 1999). (b) Agency protests filed with the Contracting Officer shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: PATRICK STAINES, CONTRACTING OFFICER 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (c) Agency protests filed with the Protest Decision Authority shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: HEAD OF THE CONTRACTING OFFICE (HCO) 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (d) A complete copy of all agency protest, including all attachments, shall be served upon the Contract Law Division of the Office of the General Counsel within one day of filing a protest with either the Contracting Officer or the Protest Decision Authority. (e) Service upon the Contract law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 1352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010) (a) A protest may be filed with either the Government Accountability Office (GAO) or the Court of Federal Claims unless an agency protest has been filed. (b) A complete copy of all GAO or Court of Federal Claims protests, including all attachments, shall be served upon (i) the Contracting Officer, and (ii) the Contract Law Division of the Office of the General Counsel, within one day of filing a protest with either GAO or the Court of Federal Claims. (c) Service upon the Contract Law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 (End of clause)
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FBO.gov Permalink
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- Place of Performance
- Address: TBD, United States
- Record
- SN03152991-W 20130820/130818233337-50f07533297c1584c9c1a341503de78a (fbodaily.com)
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