MODIFICATION
66 -- Sheet resistance mapping system
- Notice Date
- 3/11/2014
- Notice Type
- Modification/Amendment
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- AMD-14-SS21
- Archive Date
- 3/29/2014
- Point of Contact
- Eric Bubar, Phone: 3019753635
- E-Mail Address
-
eric.bubar@nist.gov
(eric.bubar@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- General Information Document Type: Sources Sought Notice Notice Number: AMD-14-SS21 Title: Sheet resistance mapping system Posted Date: 02/21/2014 Response Date: 03/14/2014 Classification Code: 66 -- Instruments & laboratory equipment NAICS Code: 334516 -- Analytical Laboratory Instrument Manufacturing Contracting Office Address Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640 The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing a sheet resistance mapping system to support nanofabrication activities in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. The mapping system shall be sited and used in the CNST NanoFab Class 100 clean room as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies. After results of this market research are obtained and analyzed and specifications are developed for the sheet resistance mapping system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. The NIST CNST NanoFab presently operates a single point sheet resistance measurement tool based on the four-point probe technique. This tool does not have the capability of measuring the resistance at multiple points on a wafer in an automated fashion. The need exists for a system that could quickly measure, store and display resistance maps over entire wafers in order to characterize the uniformity of the underlying thin films. 1. GENERAL DESCRIPTION: a.The mapping system can be a bench-top or stand-alone unit. b.The resistance measurement shall make use of the four-point probe technique. c.The wafer handling shall be manual, one wafer at a time, without cassette loader. d.The system shall be compatible with Class 100 (ISO 5) clean room environment 2.SUBSTRATE CAPABILITY: a.The system shall be capable of measuring wafers having diameters ranging from 50 mm to ≥ 200 mm. 3.TYPICAL SPECIFICATIONS: a.Resistance range: 1 microohm to 5 megohm. b.Vendors shall specify extended resistance ranges if available c.Edge exclusion: user-defined. d.Measurement time per site: ≤ 5 seconds. e.Accuracy: ≤± 0.5 %. f.Repeatability: ≤± 0.5 %. g.Auto-ranging of input current for sample under test. 4.SOFTWARE: a.Windows 7 preferred. Windows XP acceptable. b.All data files must be exportable to Excel. c.The system shall be SECS-II compliant. d.The mapping patterns available shall include: i.Polar maps ii.Rectangular/Cartesian maps iii.Line scans iv.User-defined patterns e.The plot displays available shall include: i.Contour maps ii.3D maps iii.Data maps iv.Histograms f.Calibration routine: to calibrate probe heads using NIST-traceable standards 5.ACCESSORIES: a.Spare probe heads b.NIST traceable resistance standards; preferably one for the low resistance range, and one for the high range 6.DELIVERY and INSTALLATION: The delivery and installation of the system in the CNST NanoFab clean room shall be completed in less than 3 months ARO. 7.TIMELINE: NIST anticipates issuing a Request for Proposals for the sheet resistance mapping system no later than the third quarter of fiscal year 2014 (second quarter of calendar year 2014), and awarding a Purchase Order for the system no later than the fourth quarter of fiscal year 2014 (third quarter of calendar year 2014). NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Companies that manufacture sheet resistance systems are requested to email a detailed report describing their abilities to eric.bubar@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to eric.bubar@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Point of Contact Eric Bubar, Contracting Specialist, Phone (301) 975-3635, Email eric.bubar@nist.gov
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