SOLICITATION NOTICE
70 -- NANOMETER PATTERN GENERATION SYSTEM
- Notice Date
- 9/19/2014
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC14528579Q
- Response Due
- 9/26/2014
- Archive Date
- 9/19/2015
- Point of Contact
- Dorothy E Viancourt, Purchasing, Phone 216-433-2532, Fax 216-433-5090, Email Dorothy.E.Viancourt@nasa.gov
- E-Mail Address
-
Dorothy E Viancourt
(Dorothy.E.Viancourt@nasa.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as Request for Quotations (RFQ) for Nanometer Pattern Generation System. Statement of Work Objective: The purpose of this procurement is to enable a 30 kV conventional scanning electron microscope to perform direct-write, e-beam lithography using polymethyl methacrylate (PMMA) photoresist. The goal is to write isolated lines approximately 50 nanometers in scale. It is understood that the writing field size will be similar to the image size. Interface Requirements: The Nanometer Pattern Generation System must be compatible with NASA Glenn Research Centers existing Hitachi model 2460N scanning electron microscope. The image size at 30kv and a 6mm working distance is 975microns (horizontal) by 665 microns (vertical) at the lowest magnification of 125X. The interface between the Nanometer Pattern Generation System and the scanning electron microscope shall be through the existing Digital Beam Control X-Y inputs. The Digital Beam Control interface is a 14 pin Centronics connector located at the back of the scanning electron microscope console. Other features/aspects of the Hitachi model 2460N scanning electron microscope include: -Image signal output (Video Out) is available -An external picoammeter (e.g. Keithley 6485) will be provided to the specimen current output. The contractor must provide software to interface the Nanometer Pattern Generation System to a Keithley 6485 picoammeter through a serial cable. -An electrostatic blanker is not available. The supplied Nanometer Pattern Generation System must be compatible with a retrofitted electrostatic blanker if one is added to the scanning electgron microscope at a later date. -The Hitachi scanning electron microscope does not have an automated stage. Nanometer Pattern Generation System Description: The Nanometer Pattern Generation System must include software to integrate with the Hitachi 2460N scanning electron microscope as well as lithography (computer aided design) software. The controller (interface and design computer) must be included. Cables to connect the Nanometer Pattern Generation System to the scanning electron microscope must be included. A relay or switch to permit sharing the scanning electron microscope input with another accessory, such as an Energy-dispersive X-ray spectroscopy system. The system must have the flexibility to manually and automatically align to registration marks of any shape. The system must support automated alignment to inside or outside corners of large features, such as bonding pads, when only a portion of the total feature is imaged. Detailed installation manual/instructions for the Hitachi 2460N scanning electron microscope must be included. The manual must include, as a minimum: calibration procedures, procedures for characterizing the scanning electron microscope, and interface instructions for a serial or Ethernet interface, a detailed tutorial on how to set up and run a Scanning Electron Microscope for writing nanometer patterns, sample patterns and run parameters The vendor must provide on-site training for up to five people within 6 months of hardware and software delivery. The provisions and clauses in the RFQ are those in effect through FAC 2005-76 OBTAINED FROM http://nais.nasa.gov/far/ ]. This procurement is a total small business set-aside The NAICS Code and the small business size standard for this procurement are 333242 / 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery to NASA-Glenn Research Center, 21000 Brookpark Road, BLDG 152, Cleveland, OH 44135-3191 is required. Delivery shall be FOB Destination. *********All contractual and technical questions must be in writing (e-mail) to De Viancourt (Dorothy.E.Viancouart@nasa.gov), not later than Wednesday September 24th, 2014. ******* TELEPHONE QUESTIONS WILL NOT BE ACCEPTED. ***Offers for the items(s) described above are due by SEPTEMBER 26th 2014, NOON. to De Viancourt Procurement and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.na sa.gov/Services/NEFS/NEFSHome.tml Offerors shall provide the information required by FAR 52.212-1 (JUL 2013), Instructions to Offerors-Commercial Items, which is incorporated by reference. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (SEP 2013), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 (SEP 2013), Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items is applicable and the following identified clauses are incorporated by reference: 52.204-10, 52.209-6, 52.209-10, 52.219-6, 52.219-28, 52.222-3, 52.222-19, 52.222-21, 52.2022-26, 52.222-35, 52.222-36, 52.222-37, 52.223-18, 52.225-1, 52.225-3, 52.225-13, 2.232-33 The FAR may be obtained via the Internet at URL: http://www.acquisition.gov/far/index.htm l The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/o ffice/procurement/regs/nfstoc.htm Selection and award will be made to that offeror whose offer will be most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. Other critical requirements: Delivery, compliance, complete quote, etc shall also be considered. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Offerors must include completed copies of the provision at 52.212-3 (AUG 2013), Offeror Representations and Certifications - Commercial Items with their offer. The provision may be obtained via the internet at URL: http: //farsite.hill.af.mil/reghtml/regs/far2afmcfars/fardfars/far/52_000.htm. These representations and certifications will be incorporated by reference in any resultant contract. NASA Clause 1852.215-84 (NOV 2011), Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/p ub_library/Omb.html. Prospective offerors shall notify this office of their intent to submit an offer. It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi- bin/nais/link_syp.cgi. Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any).
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