SPECIAL NOTICE
66 -- Plasma Enhanced Chemical Vapor Deposition (PECVD) System
- Notice Date
- 2/4/2015
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, District of Columbia, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-15-Q-0108
- Archive Date
- 3/6/2015
- Point of Contact
- Richard W. Hobson, Phone: 2024048582, Paul Gilroy, Phone: 202-767-1995
- E-Mail Address
-
richard.hobson@nrl.navy.mil, paul.gilroy@nrl.navy.mil
(richard.hobson@nrl.navy.mil, paul.gilroy@nrl.navy.mil)
- Small Business Set-Aside
- N/A
- Description
- NOTICE OF INTENT TO AWARD A SOLE SOURCE The Naval Research Laboratory (NRL) intends to award a Sole Source contract to Oxford Instruments for a Plasma Enhanced Chemical Vapor Deposition (PECVD) system to be installed by vendor. The system is capable of deposition of SiO2, SiNx, NH3-free SiNx, SiONx, amorphous Si (a-Si), SiC, graphene and GaN. The system is configured for a liquid metal precursor delivery of trimethylgallium (TMG) for gallium growth or similar liquid metal precursor using a type 787 bubbler. The system is capable of accommodating 200 mm wafers through an automated load lock system. The system lower DC electrode is capable of heating to 1200°C for extended periods of time for material deposition. Vendors who feel that they can provide the above requirement shall fully identify their interest and submit their capabilities to meet the above requirements within 15 days after the publication of this synopsis. Responses received after 15 days or without the required information will be considered non-responsive to the synopsis and not be considered. The proposed contract action is for supplies or services for which the Government intends to solicit and negotiate with only one source under the authority of FAR 6.302-1. Interested parties may identify their interest and capability to respond to the requirement or submit proposals. This notice of intent is not a request for competitive proposals. A determination by the Government not to compete this proposed contract based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement. Note: Vendors will be ineligible for award unless they have registered in the System for Award Management 1.01 (SAM) database. Information on SAM registration and annual confirmation requirements can be obtained via Internet athttp://www.sam.gov or by calling the Service Desk US Calls: 866-606-8220 and International Calls: 334-206-7828 and DSN: 809-463-3376.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/ONR/N00173/N00173-15-Q-0108/listing.html)
- Record
- SN03633671-W 20150206/150205000343-211ea0d59776960dc492adf66639786a (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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