SOURCES SOUGHT
66 -- Resist Spin Coating Solvent Bench
- Notice Date
- 3/6/2015
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- AMD-15-SS12
- Archive Date
- 4/7/2015
- Point of Contact
- Harry L. Brubaker, Phone: 3019758330
- E-Mail Address
-
Harry.Brubaker@nist.gov
(Harry.Brubaker@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- Document Type: Sources Sought Notice Solicitation Number: AMD-15-SS12 Resist Spin Coating Solvent Bench Posted Date: 3/6/2015 Original Response Date: 3/23/2015 4:00 PM EST Current Response Date: Classification Code: 66 -- Instruments & laboratory equipment SetAsides: NA NAICS Code: 334516 - Contracting Office Address Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640 The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing one custom solvent bench dedicated to manual resist spin-coating process to support nanofabrication in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. The bench will be sited and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies in the CNST NanoFab. After results of this market research are obtained and analyzed and specifications are developed for the custom solvent bench that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. A resist spin-coating solvent bench is an exhausted enclosure that contains two bench-mounted spinners, four high precision hotplates and a well-illuminated, unobstructed horizontal work surface in the center where researchers can safely use various types of solvent solutions. The horizontal work surface and vertical wall space are typically equipped with accessories specialized for solvent processing. For NIST, the applications are nanofabrication processes. The work surface is a liquid-tight basin that collects all liquids from solvent handling in the work surface. The construction material is typically solvent-resistant stainless, with all facility supplies plumbing rated for use with various kinds of solvent, high purity nitrogen, vacuum and air. NIST currently owns a couple of solvent benches that are nearing end-of-life and each of them has an out of dated, bulky bench-top resist spin coater sitting on, which creates a congested and cumbersome environment for manual resist processing. Configurations in both solvent benches can no longer meet the capacity requirements. In order to increase NIST's capacity to serve users and provide additional technical capabilities for nanofabrication, NIST has a need for a dedicated resist spin coating solvent bench. 1. GENERAL: Vendors will demonstrate their capability to design and build the following situations: a. The resist spin coating bench is intended to be used by researchers who need to safely perform manual resist spin coating and cleaning using various types of solvent-based chemicals. b. The bench is suitable for installation and use in a vertical laminar flow, class 100 cleanroom. c. Demonstrate the ability to accommodate 3 or more simultaneous users. d. The bench will be installed in a pre-defined location and therefore vendors need to demonstrate their ability to custom design for existing space and utilities. Provide examples of custom designs, including dimensions. e. Provide samples or state benches are equipped and support the following utilities such as but not limited to: i. high purity nitrogen, ii. compressed air, iii. vacuum, and iv. 110 VAC GFCI electrical outlets. 2. BENCH CAPABILITIES a. CO2 and/or other fire suppression systems. b. Construction with solvent resistance stainless materials. c. Capable of having wall mounted shelf (shelves). d. Capable of having cup drains for liquid and solid solvent waste separately. e. The ability to have storage space for several gallon-size bottles below the bench. f. The final bench design will have the ability to incorporate 2 work positions for resist spin coating and one clear working space for manual solvent processing. g. Each work position for resist spin coating ability to be equipped with: (1) A minimum of 2 high precision hotplates in a stack and at least one supports proximity bake. (2) One spin coater with the following capabilities: (a) Supports spin speeds under substrate load condition, provide rpm ranges. (b) Utilize removable bowl liners to facilitate cleaning. (c) Ability to store more than 10 recipes and multi-steps recipes. (3) One set of spin coater chucks capability to support various sample sizes, provide the mm range for wafers. (4) Provide the range for Wafer centering devices. (5) Ability to incorporate a high purity nitrogen spray gun. b. Provide the capability for work space to include solvent processing, including the ability for a draining system for liquid solvent waste with quick-release connector to carboy for the convenience of waste collection. 3. SAFETY: Provide capability statements that final products have the ability to meet all safety standards set forth in the Semi S2-0709 standard. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Companies that manufacture resist spin coating solvent benches are requested to email a detailed report describing their abilities to HARRY.BRUBAKER@NIST.GOV no later than MONDAY MARCH 23, 2015 by 4:00PM EST for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(s) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to HARRY.BRUBAKER@NIST.GOV are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Point of Contact HARRY BRUBAKER HARRY.BRUBAKER@NIST.GOV
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-15-SS12/listing.html)
- Place of Performance
- Address: National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- Zip Code: 20899-1640
- Zip Code: 20899-1640
- Record
- SN03660080-W 20150308/150306234205-92222553fc898a5a9ab6828f74e2931d (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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