AWARD
93 -- Electron Beam Deposition System - Redacted J&A
- Notice Date
- 6/15/2017
- Notice Type
- Award Notice
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, District of Columbia, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-17-EB03
- Archive Date
- 6/30/2017
- Point of Contact
- Ernest L. Bailey, Phone: 2027672356
- E-Mail Address
-
ernest.bailey@nrl.navy.mil
(ernest.bailey@nrl.navy.mil)
- Small Business Set-Aside
- N/A
- Award Number
- N00173-17-P-2015
- Award Date
- 6/15/2017
- Awardee
- Ferrotec USA Corporation, FERROTEC USA CORPORATION<br />, 33 CONSTITUTION DRIVE<br />, BEDFORD NH 03110-6000, BEDFORD, New Hampshire 03110, United States
- Award Amount
- $547,547.00
- Description
- Justification for Other than Full and Open competition Under Simplified Procedures Fro Certain Commercial Items In Accordance with Federal Acquisition Regulation (FAR) 13.501. The proposed system is an Electron Beam Deposition System. NRL requires an Electron Beam Deposition System capable of fabricating thin films of high melting temperature materials onto conducting, insulating and semiconducting substrates under high vacuum conditions. These films are to be subsequently lithographically patterned into various electronic devices. In order to reduce pump down time per cycle and minimize source and substrate heater contamination, the vacuum chamber is to consist of two separate sections. An electric hoist with swing-out source tray to facilitate access of the ebeam gun for cleaning, maintenance as well as material source reloading and shield removal/cleaning. The lower source chamber is to be separated from the upper product chamber by a high vacuum isolation valve which would allow the sources to remain under vacuum during substrate loading. The system is to be installed within a Class 100 clean room, and must be compatible with the requirements of that site. It's intended for use by multiple users within that site, therefore it must be computer controlled via menu-driven software, can be monitored from a location outside the clean room, and be user friendly.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/ONR/N00173/Awards/N00173-17-P-2015.html)
- Record
- SN04545926-W 20170617/170615235204-c179bf020fb6b0e23a8027eab3075a83 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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