SOLICITATION NOTICE
66 -- AUTOMATIC DIE BONDER SYSTEM - RFQ NB687100-18-02016
- Notice Date
- 5/2/2018
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- NB687100-18-02016
- Archive Date
- 6/7/2018
- Point of Contact
- Aron Krischel, Phone: 3034973032
- E-Mail Address
-
aron.krischel@nist.gov
(aron.krischel@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- RFQ NB687100-18-02016 Automatic Die Bonder System for the National Institute of Standards and Technology, Boulder, CO DESCRIPTION: THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVLAUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED AND A SEPARATE WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC-89) 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to the contracting officer within seven (7) days of the posting. All responses to the questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract. (end of provision) The associated North American Industrial Classification System (NAICS) code for this procurement is 334413 with a small business size standard of 1250 employees. This requirement is being competed as total small business set-aside. All interested responsible small business concerns may submit a quotation. The National Institute of Standards and Technology (NIST) has a requirement for the purchase of one (1) Automatic Die Bonder System. Attached are the Specifications for solicitation NB687100-18-02016. Please submit a quote for the required Automatic Die Bonder System that meet the requirements. This RFQ is conducted under the authority of FAR 13 Simplified Acquisitions with NAICS code 334413, Semiconductor and Related Device Manufacturing, having a Small Business Size Standard of 1250 employees. All communications and documents must include the solicitation # NB687100-18-02016. Please email your quote to me at aron.krischel@nist.gov no later than May 23, 2018, 1:30 PM Mountain. Please direct any questions regarding this solicitation to Aron Krischel, Contracting Officer, at aron.krischel@nist.gov no later than May 9, 2018. Your quote must meet all requirements of FAR 52.212-1, as well as include the following information: · Information sufficient to demonstrate you can meet or exceed the requirements in the Specifications. · Firm fixed price quote for a Automatic Die Bonder that meets all the requirements. · Payment Terms: Net 30. · The requested delivery is within 6 months after receipt of the order (ARO). FOB Destination for delivery to NIST, 325 Broadway, Boulder, CO 80305. Delivery point of contact will be provided upon award. · Company DUNS No. To be eligible for this award, the quoter must be registered with the System for Award Management at www.sam.gov., and have completed the Representations and Certifications therein for the specified NAICS code, or submit separate Representations and Certifications if the specified NAICS code is not listed in their SAM registration. The provision at FAR 52.212-1, Instructions to Offerors—Commercial, applies to this acquisition. Quoter shall clearly demonstrate their ability to meet the technical requirements and deliverable schedule as outlined in this solicitation. Quote shall include shipping costs. NIST reserves the right to ship under NIST provided account. BASIS OF AWARD: Award shall be made to the Lowest Price Technically Acceptable (LPTA) quote, based upon the technical specifications as detailed within the attached Specifications. This will be a firm fixed price purchase order. The Government intends to evaluate quotations and issue a purchase order based on the initial quotations received. Therefore, the quoter’s initial quotation should contain the quoter’s best terms from a price and technical standpoint. The Government reserves the right to request revised quotations from, or negotiate final purchase order terms with, one or more, but not all, quoters if later determined by the Contracting Officer to be necessary. However, the Contracting Officer will not establish a competitive range, conduct discussions, or otherwise use the procedures described at FAR 15.306. The Government may reject any or all quotations if such action is in the public interest; and issue a purchase order to other than the quoter with the lowest priced quotation. TECHNICAL CAPABILITY: Evaluation of Technical Capability will be based on the information provided in the quotation. Documentation submitted in the quotation shall be evaluated to determine that the proposed equipment meets or exceeds the Governments minimum required specifications. Failure to clearly and unambiguously demonstrate this will result in an “unacceptable“ technical rating. PRICE: Price shall be evaluated for reasonableness. FAR 52.212-2, Evaluation - Commercial Items, applies to this acquisition. The Government will award a fixed price contract to the Lowest Price Technically Acceptable (LPTA) quote, based upon the technical specifications as detailed within the attached statement of work. FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items. The quoter must have completed the Online Representations and Certifications Application (ORCA), which must be uploaded to the System for Award Management (SAM) at www.sam.gov. FAR 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition. FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders -- Commercial Items applies to this acquisition. Additional FAR 52.212-5 clauses cited in the clause applicable to this acquisition are: 52.219-28, Post Award Small Business Program Representation 52.222-3, Convict Labor 52.222-19, Child Labor – Cooperation With Authorities And Remedies 52.222-21, Prohibition of Segregated Facilities 52.222-26, Equal Opportunity 52.222-36, Equal Opportunity for Workers with Disabilities 52.222-50, Combating Trafficking in Persons 52.223-18, Contractor Policy to Ban Text Messaging While Driving 52.225-1, Buy American Act-Supplies 52.225-13, Restrictions on Certain Foreign Purchases 52.232-33, Payment by Electronic Funds Transfer FAR 52.252-1, Solicitation Provisions Incorporated by Reference: This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The quoter is cautioned that the listed provisions may include blocks that must be completed by the quoter and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the quoter may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es): at http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm FAR 52.225-18 – Place of Manufacture. FAR 52.232-15, Progress Payments Not Included CAR 1352.213-70, Evaluation Using Simplified Acquisition Procedures CAR 1352.215-70, Proposal Preparation CAR 1352.233-70, Agency Protests CAR 1352.233-71, GAO and Court of Federal Claims Protests FAR 52.252-2, Clauses Incorporated by Reference: This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es): http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm FAR 52.232-40, Providing Accelerated Payments to Small Business Subcontractors. FAR 52.247-34, FOB Destination CAR 1352.201-70, Contracting Officer’s Authority CAR 1352.209-73, Compliance with the Laws CAR 1352.209-74, Organizational Conflict of Interest CAR 1352.246-70, Place of Acceptance (APR 2010) (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract. (b) The place of acceptance will be: NIST Shipping and Receiving 325 Broadway Boulder, CO 80305 NIST LOCAL-04 BILLING INSTRUCTIONS (a) NIST prefers electronic Invoice/Voucher submissions and they should be emailed to INVOICE@NIST.GOV. (b) Each Invoice or Voucher submitted shall include the following: (1) Contract Number. (2) Contractor Name and Address. (3) Date of Invoice. (4) Invoice Number. (5) Amount of Invoice and Cumulative Amount Invoiced to-date. (6) Contract Line Item Number (CLIN). (7) Description, Quantity, Unit of Measure, Unit Price, and Extended Price of Supplies/Services Delivered. (8) Prompt Payment Discount Terms, if Offered. (9) Any other information or documentation required by the contract. (c) In the event electronic submissions are not used, The Contractor shall submit an original invoice or voucher in accordance with the payment provisions of this contract to: NIST Accounts Payable Office 100 Bureau Drive, Mail Stop 1621 Gaithersburg, MD 20899-1621 NIST LOCAL - 39, MARKING/PACKING INSTRUCTIONS (1) If the total contract/order includes multiple quantities of the same or like item(s), segregated as separate CLIN/Item numbers, deliverables shall be packed accordingly. Each individual Package / container in the shipment shall include deliverables on a per-CLIN or Item basis. (2) For each shipment made under this contract/order, the Contractor shall furnish itemized packing list(s), enumerating the specific contents of each shipping container and what specific individual components constitute a full and complete "unit" for each bid item. The packing list shall include the brief description of each item found in the Schedule. If more than one container is required for each unit, each container should be marked accordingly, e.g., "Box 1 of 2," "Box 2 of 2," and the boxes, where feasible, should be taped or shrink-wrapped together as an Issuable unit. (3) The contract number AND CONTRACT LINE ITEM NUMBER (CLIN) OR ORDER ITEM NUMBER shall be placed on the exterior of all containers. NIST LOCAL – 53, Contract Performance During Changes in NIST Operating Status Unless otherwise stated in the contract terms and conditions, normal days of business operation are Monday through Friday, excluding Federal Holidays. However, throughout the contract period of performance, there may be circumstances beyond the control of the U.S. Department of Commerce, National Institute of Standards and Technology (NIST), that will impact normal days of business operation, such as inclement weather, power outages, etc. In circumstances such as these, the Contractor must call the appropriate NIST campus status line to verify the operating status: Gaithersburg Campus Operating Status Line: (301) 975-8000 (800) 437-4385 x8000 (toll free) Boulder Campus Operating Status Line: (303) 497-4000 During a lapse in appropriation, access to Government facilities and resources, including equipment and systems, will be limited to excepted personnel for both Federal employees and Contractor personnel. If performance of the contract is onsite and/or requires Government interaction, unless you have been, or are notified that you are to work under an excepted status, you will automatically enter a temporary work stoppage. The work stoppage shall remain in effect until the lapse is resolved and notification is provided via the NIST website at https://www.nist.gov/ and/or the NIST operating status lines. Additionally, Contractors are encouraged to monitor public broadcasts or the Office of Personnel Management’s website at www.opm.gov for the Federal Government operating status. NIST will provide notification to all contractors that are determined to have excepted status. All excepted contractors are required to continue performance and communicate with the appointed Contracting Officer’s Representative (COR) for further guidance, or NIST Contracting Officer if a COR is not appointed. Contractors with supply or service contracts that are fully funded at the time of contract award and do not require access to Government facilities, resources, or active administration by Government personnel in a manner that would cause the government to incur additional obligations during the lapse in appropriation may continue performance. If you have any questions, please do not hesitate to contact me at aron.krischel@nist.gov. Aron Krischel Contracting Officer for National Institute of Technology 325 Broadway Boulder, CO 80305 REQUIREMENTS Automatic Die Bonder NB 687100-18-02016 BACKGROUND: NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). The Boulder Microfabrication Facility (BMF) at the National Institute of Standards and Technology (NIST) requires an automatic die bonder system capable of supporting semiconductor die bonding hybridization processes. PURPOSE: The Boulder Microfabrication Facility (BMF) at the National Institute of Standards and Technology (NIST) requires an automatic die bonder system capable of supporting semiconductor die bonding hybridization processes. The addition of die bonding processes will allow the NIST BMF to build complex hybrid structures assembled from multiple die or “chips”. Application areas include integrated photonics, quantum information, sensors, and micro-fluidics. Die bonding is increasingly utilized for these fields; as such this new capability is required for NIST mission critical work. The specifications of the automatic die bonder system are guided by application area requirements and BMF facilities requirements and guidelines. SPECIFIC REQUIREMENTS: 1 each Automatic Die Bonder System TECHNICAL SPECIFICATIONS: 1. MECHANICAL: a. The automatic die bonder system shall be constructed of materials compatible with a ISO 14644 class 5 (FED 209 class 100) cleanroom. b. The footprint of the main system shall be less than 80 in by 70 in. This footprint does not need to include auxiliary components such as chillers. c. The height of the main system shall be less than 7 feet 6 inches tall. 2. STAGES AND TRANSPORT: a. The automatic die bonder system shall have an upper vacuum chuck capable of accommodating tooling up to a size of 50 mm by 50 mm. b. The automatic die bonder system upper vacuum chuck shall be upgradable to accommodate tooling up to a size of 100 mm by 100 mm. c. The automatic die bonder system shall have a lower vacuum chuck that can accommodate tooling up to a size of 150 mm by 150 mm. d. The lower stage shall be supported by air bearings on a granite reference surface for high positioning accuracy. e. The stage travel shall be at least 150 mm and above in both the x and y directions with steps down to at least 0.1 microns. f. The automatic die bonder system shall be capable of face-up alignment. 3. DIE TRAY CAPACITY: a. The loading area of the automatic die bonder system shall be able to accommodate H44 (4 in. by 4 in) format die trays. b. The loading area of the automatic die bonder system shall be able to accommodate H20 (2 in. by 2 in) format die trays. 4. CHUCK TOOLING: a. For chuck tooling, materials with a low coefficient of thermal expansion shall be used to closely match silicon. b. Five sets of upper chuck tooling shall be provided (die size to be determined). c. One set of lower chuck tooling shall be provided (vacuum groove patterns to be determined). 5. STAGE HEATING: a. The automatic die bonder system shall be able to provide upper and lower stage heating up to 450 degrees Celsius independently. b. The heating shall be quick, with an average heating rate of 2 degrees Celsius per second or better and an average cooling rate of 1 degrees Celsius per second or better. c. The heating shall be uniform controllable to 2 degrees Celsius. 6. ALIGNMENT CAPABILITY: a. The automatic die bonder system shall be able to perform manual alignment with optics in the magnification up to 400X or higher. b. The field of view must be 300 microns x 200 microns or greater. c. The alignment travel must use an air-bearing x-y stage and be 100 mm x 100 mm or better. d. The alignment accuracy must be 1 micron or better. 7. LEVELING CAPABILITY: a. The automatic die bonder system shall be able to perform active auto-collimation leveling. b. The automatic die bonder system shall be able to perform active laser leveling. c. Physical contact between the die is not allowable before bonding. d. The laser leveling shall provide a sensitivity of 0.2 microns or better. e. The resolution of the active leveling mechanism shall be 5 micro-radians or better. 8. BONDING CAPABILITY: a. The automatic die bonder system shall be able to provide a bonding force of at least 1000 newtons. b. The automatic die bonder shall be able to read a force range of 1 newtons to 1000 newtons. This may be accomplished with multiple force sensors c. For forces less than 50 newtons, the force sensitivity must be better than 0.1 newtons. d. For forces greater than 50 newtons, the force sensitivity must be better than 1 newtons. e. The post-bonding accuracy shall be 3 microns or better (3-sigma). 9. DOCUMENTATION: a. The contractor shall provide a list of required facility hookups including electrical, process gas, and process cooling water within one (1) month from ARO. b. The contractor shall provide overview installation mechanical drawings of the system which indicate the system size and required clearances within one (1) month from ARO. c. Upon delivery, the contractor shall supply instruction manuals for the main system and all subsystems in digital format. DELIVERY: 1. Delivery shall be FOB DESTINATION and take place six (6) months from ARO unless mutually agreed upon the Government’s ability to receive earlier. 2. In accordance with 52.247-35, the Contactor shall deliver the system to: NIST 325 Broadway Boulder CO, 80305. INSTALLATION: 1. After consultation with NIST the contractor shall determine if a site inspection is required before delivery. 2. The contractor shall be responsible for uncrating and placing the system in the BMF cleanroom. 3. NIST will install all required facility hookups to the system. 4. The Contractor shall perform the initial startup of the system during a mutually agreed upon installation/training session. The installation/training session must take place within two (2) months of delivery. TESTING AND INSPECTION: 1. The Boulder Micro-Fabrication Facility Group (687.10) will physically inspect the automatic die bonder system to verify that it meets the requirements listed in the technical specifications. 2. Final acceptance will be determined within 30 calendar days after tool commissioning and user training is completed. WARRANTY: A one-year warranty shall be included. The warranty shall cover parts, labor and travel. PAST EXPERIENCE: The contractor shall provide documentation material to demonstrate the successful deployment of at least one similar system in a ISO 14644 class 5 (FED 209 class 100) research cleanroom. TRAVEL: 1. If possible, travel expenses for site visits, installation, and training shall be listed as a separate line item. 2. Flight, lodging and meal expenses should be consistent with Federal Travel Regulations.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB687100-18-02016/listing.html)
- Place of Performance
- Address: N/A, United States
- Record
- SN04907657-W 20180504/180502230856-f28d5791403015061fa3713e1f512937 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |