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FBO DAILY - FEDBIZOPPS ISSUE OF JUNE 03, 2018 FBO #6036
SOURCES SOUGHT

66 -- Electron Beam Lithography System - Ebeam Cover Letter

Notice Date

6/1/2018
 

Notice Type

Sources Sought
 

NAICS

334516 — Analytical Laboratory Instrument Manufacturing
 

Contracting Office

Department of Energy, Lawrence Berkeley National Laboratory (DOE Contractor), Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California, 94720, United States
 

ZIP Code

94720
 

Solicitation Number

RFI_180901_EBeam
 

Archive Date

6/29/2018
 

Point of Contact

Craig Hopkins, Phone: 5104865934
 

E-Mail Address

CGHopkins@lbl.gov
(CGHopkins@lbl.gov)
 

Small Business Set-Aside

N/A
 

Description

Introduction and some background information for the RFI Lawrence Berkeley National Laboratory (LBNL) is seeking sources to provide Analytical Laboratory Instruments. The specific instrument is an Electron Beam Lithography (EBL)System, nanowriter. Specifications for this instrument are: High performance EBL should be able to run in a large range of beam currents to allow super high resolution (sub 8 nm) in low current processes and decent resolution (around 25 nm) for larger area processes (high current) with a maximum, usable beam current of above 350 nA. Other specification: Automated loading of multiple wafers and samples; the possibility to write on a non-planar and irregular surface adjusting the z-lift; 1mm maximum field size & 100kV; Field stitching accuracy (nm) ± 12; Overlay accuracy (3σ)(nm) 5 Beam positional stability: Noise (nm) < 3 pk/pk, Typical beam position drift (open loop) (nm/hr) < 10 pk/pk ; Beam current stability over time(%/hr) 0.5, across field (%) ± 0.5; current range (nA) 0.05 - 350 Deflection correction, Focus, astigmatism and field distortion dynamically corrected Resolution (grating half-period) (20% tolerance across field) (20nm HSQ) solid silicon wafer:10 nm Writing Patterned Area (inch) 8x8; Stage z-travel range (mm)10 More Specifications can be provided upon request.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/LBNL/LB/RFI_180901_EBeam/listing.html)
 

Place of Performance

Address: Lawrence Berkeley National Laboratory, One Cyclotron Road, Berkeley, California, 94720, United States

Zip Code: 94720
 

Record

SN04940605-W 20180603/180601230621-9b6d766bb03be6e4f320e2ee71fb0fc5 (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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