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SAMDAILY.US - ISSUE OF FEBRUARY 07, 2021 SAM #7010
SPECIAL NOTICE

66 -- (Rescinded) Notice of Intent to Sole Source / Silterra Malaysia / Low Volume Microfabrication of 2D MEMS piston mirror array SLMs

Notice Date
2/5/2021 2:51:57 AM
 
Notice Type
Special Notice
 
NAICS
333242 — Semiconductor Machinery Manufacturing
 
Contracting Office
DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
 
ZIP Code
20899
 
Solicitation Number
NB681010-21-00428
 
Response Due
2/8/2021 9:00:00 AM
 
Archive Date
02/23/2021
 
Point of Contact
Joni L. Laster, Phone: 3019756205, Patrick K Staines
 
E-Mail Address
joni.laster@nist.gov, patrick.staines@nist.gov
(joni.laster@nist.gov, patrick.staines@nist.gov)
 
Description
This notice of intent to sole source is hereby rescinded. The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate a firm fixed price purchase order, on a sole source basis, with Silterra Malaysia SDN.BHD., for the purchase of foundry fabrication services for microdevices, for the Physical Measurements Laboratory (PML). The statutory authority for this sole source acquisition is FAR 13.106-1(b) by the authority of FAR Part 13.5 Simplified Procedures for Certain Commercial Items. The National Institute of Standards and Technology (NIST)/Microsystems and Nanotechnology Division (MND) develops integrated microsystems by advancing the state of the art in nanofabrication to enable the transfer of NIST measurement technologies to the industrial, academic, and government communities. This procurement is necessary to develop new measurement methods and facilitate technology transfer of NIST advanced measurement technologies. The Contractor must be capable of economically developing, implementing and providing low-volume microfabrication of custom micromechanical mirrors. Specifically, the Contractor must be capable of economically developing, implementing and providing low-volume microfabrication of 2D MEMS piston mirror array spatial light modulators (SLMs) according to NIST design and specifications. NIST is seeking to ultimately demonstrate a path to megapixel scale monolithically integrated CMOS-driven MEMS SLMs in the visible and near IR with pixel pitch of 10 micrometers or less. Batch fabricating of MEMS mirrors with springs of arbitrary shapes and precise critical dimension control on top of CMOS circuitry at wafer scale. Minimum feature down to 200 nm, interlayer alignment down to 50 nm with deep UV optical lithography. Other required fabrication steps are deposition of thin, low stress, structural layers down to 100nm.� The Contractor shall microfabricate arrays of prewired test 2D MEMS piston mirror array spatial light modulators (SLMs) according to NIST design and specifications for verification at NIST. The Contractor must have the necessary expertise to implement the full fabrication sequence and provide a process compatible with integration with CMOS controlling drivers. The Contractor must offer and provide a feasibility run implementing a wiring layer and MEMS SLM test devices and arrays and provide several wafers to evaluation as a required deliverable. NIST has performed extensive market research and found only one responsible source (Silterra Malaysia) that can provide the necessary batch fabrication for the SLM�s. �Therefore, Silterra Malaysia is uniquely qualified to fabricate the SLMs according to NIST requirements.� The North American Industry Classification System (NAICS) code for this acquisition is 333242 and the size standard is 1,500 employees. No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. The Government will consider responses received by 12:00 p.m. Eastern on February 8, 2021. Inquiries will only be accepted via email to joni.laster@nist.gov . No telephone requests will be honored. A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.
 
Web Link
SAM.gov Permalink
(https://beta.sam.gov/opp/ff7274ad18864720ab05028c8d273c46/view)
 
Place of Performance
Address: Gaithersburg, MD 20899, USA
Zip Code: 20899
Country: USA
 
Record
SN05909362-F 20210207/210205230100 (samdaily.us)
 
Source
SAM.gov Link to This Notice
(may not be valid after Archive Date)

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