Loren Data's SAM Daily™

SAMDAILY.US - ISSUE OF SEPTEMBER 10, 2021 SAM #7223
SOLICITATION NOTICE

66 -- Spectroscopic Ellipsometer

Notice Date

9/8/2021 3:49:30 PM
 

Notice Type

Combined Synopsis/Solicitation
 

NAICS

334516 — Analytical Laboratory Instrument Manufacturing
 

Contracting Office

SLAC Natl Accel Lab -DOE Contractor Menlo Park CA 94025 USA
 

ZIP Code

94025
 

Solicitation Number

322378
 

Response Due

9/15/2021 7:00:00 AM
 

Archive Date

09/30/2021
 

Point of Contact

Cheri McLaggan, Phone: 6509267402, Angela Garcia, Phone: 6509265011
 

E-Mail Address

cheri@SLAC.stanford.edu, angelag@slac.stanford.edu
(cheri@SLAC.stanford.edu, angelag@slac.stanford.edu)
 

Description

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions. SLAC is seeking to buy�a�spectroscopic ellipsometer for measuring�dielectric properties of thin films on substrates�up to 150 mm. the detail technical requirements are as follows: 1. Multi-points mapping --> allow us to map out 150 mm wafer 2. Spectroscopic Ellipsometer with dual rotating compensator --> Useful for anisotropic materials or patterned materials; prefer Halogen or Xenon lamp for continuous wavelength white light. 3. large range of incident angles --> useful to find optical constants of rough or inhomogeneous materials and thicker films and transparent substrates 4. small spot size --> Important for patterned wafers such as device wafers 5. wide spectral range --> for better and accurate data to fit a model and for thicker materials� 6. sample size: up to 150 mm 7. maximum photoresist thickness: larger than 10 um (our thick photoresist is about 9 um) 8. maximum metal thickness: less than 30 nm 9. Each tool must be listed or labeled by a Nationally Recognized Test Laboratory (NRTL) per OSHA, Cal-OSHA and NFPA 70E Article 350 requirements, or be field evaluated by a NRTL per NFPA 70E Article 350.6 prior to shipment to confirm compliance with US safety standards. Provide 2 copies of NRTL Field Evaluation Report to SLAC. The award will be made based upon the Lowest Price Technically Acceptable basis. The evaluation factors will be as follows: Multi-points mapping for substrate up to 150 mm Dual rotating compensator Large range of incident angles Small spot size Maximum photoresist thickness: > 10 um Maximum metal thickness: < 30 nm Wide spectral range Marking of Proprietary/Confidential Information. Offerors shall properly mark and identify with a restrictive legend or information markings on pages of the proposal that contain Proprietary/confidential information. For Offeror to be eligible for a subcontract award with the University and the U.S. Department of Energy (DOE), Offeror shall be registered with the System for Award Management (SAM). Entities may register at no cost directly at the SAM website: https://www.sam.gov. The resulting purchase order shall be performed in accordance with SLAC National Accelerator Laboratory's Terms and Conditions for Fixed Price Commercial Supplies and Services dated December 2016 NOTE: The following documents are attached in this solicitation. Buy American Act Certificate SLAC's Representations and Certifications Rider Terms & Conditions for Fixed Price Commercial Supplies and Services, December 2016 Please provide quoted price, delivery, technical compliance statement and certification to the attention of Cheri McLaggan. Payment Terms: Net 30 days Freight terms: FOB Destination Prepaid and Add
 

Web Link

SAM.gov Permalink
(https://beta.sam.gov/opp/bab11d22e381455bb88cf2a80f58e49a/view)
 

Place of Performance

Address: Menlo Park, CA 94025, USA

Zip Code: 94025

Country: USA
 

Record

SN06126010-F 20210910/210908230133 (samdaily.us)
 

Source

SAM.gov Link to This Notice
(may not be valid after Archive Date)

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