SAM#7927
34 - Metalworking Machinery
SAMDaily.us: MODIFICATIONS - August 11, 2023
- NB680000-23-00677 - Justification
HBR-CL-BASED ICP SILICON ETCH SYSTEM AND DRIE-BASED ICP SILICON ETCH SYSTEM
COMMERCE, DEPARTMENT OF NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, DEPT OF COMMERCE NIST, GAITHERSBURG, MD 20899 USA
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