SOURCES SOUGHT
66 -- Optical Tables and Vibration Isolation System
- Notice Date
- 10/16/2023 5:58:01 AM
- Notice Type
- Sources Sought
- NAICS
- 334519
— Other Measuring and Controlling Device Manufacturing
- Contracting Office
- DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
- ZIP Code
- 20899
- Solicitation Number
- NIST-SS24-01
- Response Due
- 10/30/2023 8:00:00 AM
- Archive Date
- 11/14/2023
- Point of Contact
- Tracy Retterer, Forest Crumpler
- E-Mail Address
-
Tracy.retterer@nist.gov, forest.crumpler@nist.gov
(Tracy.retterer@nist.gov, forest.crumpler@nist.gov)
- Description
- BACKGROUND NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the following draft minimum specifications: ? The requirement is for an Optical Tables with Vibration Isolation System that will the supporting platform for newly procured infrared wavelength laser, the generation of vacuum- and extreme-ultraviolet light from that laser, and associated vacuum beamlines.� The project being pursued will allow the measurement of nanoscale semiconductor patterns by shining EUV and VUV light onto such samples and measuring the reflected, diffracted, and scattered light to determine the dimensions of these patterned features.� Such projects have been carried out at longer wavelengths at NIST but this requirement is necessary to facilitate the necessary stiffness and vibrational stability needed when using short wavelengths of light to yield better information about nanoscale dimensions especially as semiconductor dimensions continue to decrease.������ Scope Optical Tables and Vibration Isolation System: Quantity (1) This combined Opticals Table and Vibration Isolation System with be the mounting surface and supports to enable the demonstration of a recently procured table-top lab-based laser source, high-harmonic generator, and its beamlines so that we can meet our mission of determining nanoscale dimensions of patterned wafers from reflected, scattered, and diffracted light, in support of the US Semiconductor Industry. Minimum Requirements The Contractor shall provide the following (1) Optical Tables with Vibration Isolation System that meet the following minimum specifications: �����Components of the System: The Optical Table and Vibration Isolation System shall consist of two subsystems: honeycomb tables and vibration isolators. A�honeycomb table� shall be assumed to mean �� an optical test table made up of two outer layers or ""skins'' bonded to either side of a honeycomblike core, usually of aluminum or steel. It results in equal quality with greatly reduced weight relative to a granite surface plate of the same size.� Source: website �Photonics Marketplace� (accessed 10/5/2023) https://www.photonics.com/Buyers_Guide/Honeycomb_Tables/ca62800/ � ����Honeycomb Tables These specifications assume that two separate tables shall be capable of being joined together, as the specified shape requirement S2.5 cannot fit through the doors and corridors at NIST as a single custom table.� The top �skin� of the Honycomb Tables shall be perforated with holes tapped for� �-20 bolts.� These tapped holes shall be in a square grid spaced 1 inch apart, and The distance from the edges of the grid pattern to the edges of the top �skin� must be less than 2 inches on all sides. The tapped holes shall be sealed from below the top �skin.� These Honeycomb Tables shall have rounded edges for safety. The Honeycomb Tables shall have on its bottom �skin� the necessary all tapped holes, brackets, etc. to connect vibration isolation components to these Tables. Viewed from above, the Optical Table and Vibration Isolation System shall be shaped in an inverted �L� shape. The two Honeycomb Tables shall be configurable on site at NIST into the inverted �L� shape using connecting hardware provided by the vendor.� Listed clockwise with the lower left defined as (x,y) = (0, 0), the outer perimeter of the inverted �L� shall be the line connecting (0, 0) -> (0, 10) -> (5, 10) -> (5,5) -> (5, 17) -> (0, 17) �?> (0, 0), in feet.� Tolerances for vertices are defined in S2.6 and S2.7. The first Honeycomb Table shall be (5 � 0.1) feet x (10 � 0.2) feet x (18 � 0.3) inches. The second Honeycomb Table shall be (5 � 0.1) feet x (12 � 0.1) feet x (18 � 0.3) inches. The first and second Honeycomb Tables shall be joined along the line defined by the vertices, in feet: (0,5) -> (5,5). The first Honeycomb Table shall allow an approximate 800 lb load on the tabletop.� The second Honeycomb Table shall allow an approximate 200 lb load on the tabletop. For each of the Honeycomb Tabletops: The Natural frequency shall be at least 100 Hz, Q factor, or Max amplification at first resonance, shall be at most 10. �����Vibration Isolators: As these specifications assume the use of two separate tables joined together (S2.1), the vibration system shall have a minimum of eight legs, at least four per table. Pneumatic isolation legs shall be self-leveling using house compressed air ?�100�psi. The height, h, of the Optical Table and Vibration Isolation System shall be between 30� and 36�� (30� < h < 36�). The pneumatic isolators shall provide an over-travel limiting mechanism for safety precautions. For each of the two Honeycomb Tables, the Vibration Isolation shall have a weight capacity that is at least 1200 lbs. greater than the Honeycomb Table weight. Pneumatic isolators shall have a natural frequency in the vertical direction of ? 1.8�Hz in response to true, low-seismic (micro-g) level inputs consistent with �real-world� floors. High-seismic input level frequency response will not be evaluated. Pneumatic isolators should have a natural frequency in the horizontal direction of ?�2.9 Hz in response to true, low-seismic (micro-g) level inputs consistent with �real-world� floors. High-seismic input level frequency response will not be evaluated. Typical pneumatic isolator amplification factors at resonance should be no more than 10x in response to true, low-seismic (micro-g) level inputs of �real-world� floors. They should also have a high ""roll-off"" beyond resonance yielding the following attenuation factors: In the vertical direction: �? 85% at 5 Hz and ? 95% beyond 10 Hz. In the horizontal direction: ? 75% at 5 Hz and ? 92% beyond 10 Hz. Additional Capabilities In addition to the minimum requirements above, information is sought as to whether the following options are available: � Additional Capability #1)� For each of the Honeycomb Tabletops, the Q factor, or Max amplification at first resonance, shall be at most 6 (replaces S2.12ii). Additional Capability #2)� The vendor shall provide a CAD drawing of the assembled System Optical Table and Vibration Isolation System. Additional Capability #3)� The System shall be assembled by vendor or vendor�s agent on-site at NIST Gaithersburg, Building 217 E116. Additional Capability #4)� The system shall be fabricated and delivered to the NIST Gaithersburg within three months upon receipt of order. Additional Capability #5)� ��The height, h, of the Optical Table and Vibration Isolation System shall be no greater than 32� (supersedes S3.3). Questions We wish to ask the following: Question #1)� How many of the tapped holes (S2.2) would be blocked due to the joining (S2.8)? Question #2)�� With a 800 lb mass on Honeycomb Table #1, would additonal supports below be necessary? Question #3)� What is the frequency versus transmissibility for each of Vibration Isolators per Honeycomb Table? Question #4)� What is the compliance curve for each of the Honeycomb Tables? HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORRMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response:� Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact specialist listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company�s Unique Entity ID (UEI). Identify any aspects of the description of the requirements in the BACKGROUND section above that could be viewed as unduly restrictive or create unnecessary barriers that adversely affect your firm�s ability to fully participate in a procurement for such services and explain why.� Please offer suggestions for how the requirements could be organized or structured to encourage the participation of small businesses. State if your company is the manufacturer of the identified equipment or is a retailer or wholesaler that normally sells the identified equipment.� If the latter, indicate whether the manufacturer authorized in writing for your company to sell the identified equipment on behalf of the manufacturer. Describe performance capabilities and relevant or beneficial physical and functional features for any equipment you identified to satisfy the NIST-identified minimum specifications described in this notice. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization. For the NAICS code listed in this notice: Indicate whether your company is (a) a small business or (b) other than small business.� See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.� Describe services that are available with the purchase of the aforementioned equipment from your company such as installation, training, and equipment maintenance. Describe standard terms and conditions of sale offered by your company for the aforementioned equipment such as: delivery time after your company accepts the order; FOB shipping terms: manufacturer warranty (including details regarding nature and duration); if available, description(s) of available extended warranty; equipment setup and test; operator and service instruction manual(s); cleanup after installation; and if applicable, other offered services.� Provide a copy of manufacturer standard terms and conditions that typically relate to the sale of the specified equipment, if available. State published price, discount or rebate arrangements for aforementioned equipment and/or provide link to access company�s published prices for equipment and services.� State whether the aforementioned equipment is manufactured in the United States and, if not, state the name of the country where the equipment is manufactured. Identify any plans/possibilities for changes in manufacturing location of the aforementioned equipment and provide relevant details. If the aforementioned equipment and related services are available for purchase on any existing Federal Supply Schedule contract(s) or other contracts against which NIST may be able place orders, identify the contract number(s) and other relevant information. Identify any customers in the public or private sectors in which you provided the aforementioned or similar equipment.� Include customer(s) information: company name, phone number, point of contact, email address. Provide any other information that you believe would be valuable for NIST to know as part of its market research for this requirement. State if you require NIST to provide additional information to improve your understanding of the government�s requirement and/or would like to meet with NIST representatives to discuss the requirement and the capabilities of the identified equipment. QUESTIONS REGARDING THIS NOTICE Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice.� Questions should be submitted so that they are received by 11:00 a.m. Eastern Time on October 23, 2023.� Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline. IMPORTANT NOTES The information received in response to this notice will be reviewed and considered so that NIST may appropriately solicit for its requirements in the near future.� This notice should not be construed as a commitment by NIST to issue a solicitation or ultimately award a contract. � Responses will not be considered as proposals or quotations. No award will be made as a result of this notice. � NIST is not responsible for any costs incurred by the respondents to this notice. NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate. Thank you for taking the time to submit a response to this request!
- Web Link
-
SAM.gov Permalink
(https://sam.gov/opp/c02a4019c4cc48aa9c541fbd71bf44ae/view)
- Place of Performance
- Address: Gaithersburg, MD 20899, USA
- Zip Code: 20899
- Country: USA
- Zip Code: 20899
- Record
- SN06860702-F 20231018/231016230050 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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