SOLICITATION NOTICE
66 -- Plasma Cleaner
- Notice Date
- 7/3/2024 2:37:55 AM
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
- ZIP Code
- 20899
- Solicitation Number
- 1333ND4QNB030386
- Response Due
- 7/12/2024 8:00:00 AM
- Archive Date
- 07/27/2024
- Point of Contact
- Joni L. Laster, Tracy Retterer
- E-Mail Address
-
joni.laster@nist.gov, Tracy.retterer@nist.gov
(joni.laster@nist.gov, Tracy.retterer@nist.gov)
- Small Business Set-Aside
- SBA Total Small Business Set-Aside (FAR 19.5)
- Description
- The National Institute of Standards and Technology�s (NIST) Nanoscale Device Characterization Division has need for a high-vacuum compatible plasma cleaner.� It will be installed onto the already procured extreme ultraviolet (EUV) high-harmonic generation (HHG) laser source.� The process of HHG leaves carbon deposits on mirrors within the laser source that reduce flux downstream over time.� The objective of the plasma cleaner is to remove this buildup from the HHG to ensure the maximum available flux of these EUV photons.� This is in direct support of the �EUV Scatterometry� Project under Grand Challenge 2, �Advanced Metrology for Future Microelectronics Manufacturing,� for NIST�s CHIPS Research & Develop Metrology.� Semiconductor manufacturing requires optics to sample across 300 mm diameter wafers.� Visible and ultraviolet wavelengths are used today, but with the onset of highly complex geometries and materials these wavelengths may be insufficient.� To address the need for non-destructive optics-based metrology at shorter wavelengths, NIST is developing a novel measurement science approach in the vacuum and extreme ultraviolet as a new metrology that should prove critical to production methods in chip manufacturing.� This CHIPS R&D Metrology Project requires this instrumentation to maximize the EUV intensity in the laboratory using the HHG.� Contractor shall supply (1) Plasma cleaner system that is compatible with a high-vacuum chamber, inclusive of FOB Destination shipping and warranty.�� See attachments for the complete notice details�
- Web Link
-
SAM.gov Permalink
(https://sam.gov/opp/2975f866660541cd8066dde8f292f2e9/view)
- Place of Performance
- Address: Gaithersburg, MD 20899, USA
- Zip Code: 20899
- Country: USA
- Zip Code: 20899
- Record
- SN07117578-F 20240705/240703230116 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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