National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room Bll7, Gaithersburg, MD 20899

66 -- LASER DEPOSITION/LASER CUTTING SYSTEM SOL 52SBNB5C8609 POC Catherine Poole (301) 975-4154 POC Pauline Mallgrave (301) 975-6330 The NIST intends to enter into a contract with Florod Corporation of Gardena, California, under the authority of 41 USC 253(c)(1)-- Only one responsible source, to procure Laser Deposition/Laser Cutting System, Model LDS/LCP, and a Compact green YAG laser module, Model LCT-532. The system shall be a complete working system which shall include all the necessary components for laser cutting and laser deposition of thin metals on substrates such as silicon, glass, or ceramic. These functions shall be accomplished with no special atmospheric chambers or require any moving parts in the changeover between the argon and YAG laser sources. The optical train shall include the appropriate reflective coatings to permit instant use of either laser by simply activating the laser power on switch. The system shall be custom modified to be compatible with an existing wafer-probe station at NIST. The system shall meet the following salient characteristics: (1) The system shall be provided with a frequency doubled YAG laser operating at 532nm and deliver at least 180 microjoules of energy through a 50X objective with a pulse width not greater than 6 nanoseconds. (2) An infinitely variable spot marker from less than 1 micrometer to greater than 25 micrometers shall target and shape the beam in both the x and y axis for the frequency doubled YAG laser. (3) A Florod LFA style laser microscope shall be provided including a Mitutoyo binocular, laser focusing objectives (20X, 50X) on a four port turrent, and a standard focuser with a 25 mm z-travel with vertical illumination. (4) The maximum footprint of the system shall not exceed 6552 square cm. (5) The system shall be compatible with a NIST supplied argon laser operating at 488nm and 514nm and providing 0.5 Watts or more of CW energy. (6) The deposition system shall generate geometrics down to 5 micrometers wide and the ability to write to any length. (7) A droplet ejector/sprayer shall be supplied for application of a metallo- organic solution in adjustable quantities. (8) A camera mount with a focal tube adaptor will be provided that will be compatible with a NIST-supplied CCD color camera for coaxial viewing and YAG laser focus. The camera mount shall utilize the camera port, not either port of the binoc. (9) The system shall include an enclosure for the area surrounding the final objective down to the workpiece to maintain a CDRH Class I rating and/or Class I qualification under Title 21, CFR, part 1040 for a laser product. (1) The probe platen shall accommodate the droplet ejector/sprayer and at least two probes. Florod Corporation is the only company that manufactures a laser system that can both cut and perform metal deposition via a metallo-organic technique, and meet the salient characteristics described above.--Required delivery-60 days--F.O.B. Destination: Gaithersburg, Maryland--This notice of intent is not a request for competitive proposals. Responses shall contain sufficient documentation to establish a bonafide capability to fulfill the requirement. A solicitation is not available. See Note 22. (0017)

Loren Data Corp. http://www.ld.com (SYN# 0412 19950118\66-0001.SOL)