TECHNOLOGY TRANSFER OPPORTUNITY - HIGH CURRENT ION IMPLANTER, 2 KV - 200 KV LBL-TTD-95-01. Due 022895. Contact Glen Dahlbacka, fax 510-486-6457. Technology Transfer Department, MS 90-1070, Lawrence Berkeley Laboratory, Berkeley, CA, 94720. Lawrence Berkeley Laboratory (LBL) under contract with the U.S. Department of Energy proposes to cooperate in development of an ion implanter to operate from 2 kV to 200 kV with magnetic analysis. LBL is seeking statements of interest from industrial partners. The industrial partner should have the capability to fabricate ion implanters with the following properties. The pre-analysis section should be capable of matching the space charge equivalent of greater than or equal to 15 mA BF2+ at 2 keV to the analysis magnet aperture, or, greater than or equal to 60 mA BF2+ at 35 keV. The POST analysis section should be capable of delivering the space charge equivalent of greater than or equal to 10 mA of B+ at 2 keV, or 20 mA of As+ from 20 keV to 200 keV to a target region. The initial phase of this program will be to develop a detailed mechanical design and electrical control algorithms in collaboration with staff of LBL based on work already done at LBL. The design is intended to be built and tested at a commercial site as a prototype for commercial ion implantation. LBL is seeking a partner willing to fund this effort through a Cooperative Research and Development Agreement (CRADA). Please submit statements of interest by February 28, 1995.

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