National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room Bll7, Gaithersburg, MD 20899

66 -- BRAND NAME OR EQUAL WYKO RST PLUS BASE SYSTEM: A VERTICALLY SCANNING INTERFERENCE MICROSCOPE SOL 51SBNB5C8645 DUE 032495 POC Kathleen Lettofsky (301) 975-6342/C.O.: Ruth Ann Maris The National Institute of Standards and Technology (NIST) intends to purchase on a Brand Name or Equal Basis the following equipment: WYKO RST Plus Base System (110VAC) (A vertically- scanning interference microscope for three dimensional surface profile measurements), including: 1) Microscopy stand assembly; 2) Monochrome 9 inch video monitor for sample viewing and alignment; 3) Standard maximum vertical scan range of 150 microns; 4) Full field Resolution Options (119x184, 230x368, 480x736, 256x256); 5) Interface Box; 6) Sample stage TT-750 +/- 6 degree Tip/Tilt adjustment, +/- 2 inch X/Y translation, +/- 90 degree rotation; 7) Camera assembly: CCD solid state array, User Selectable Measurement Arrays, Output: 8 bit digital/standard, RS-170 2:1 interlaced; 8) Computer Controller: Dell Pentium (TM) with a new Pentium chip, )500 MB Hard Drive, 16 MB RAM Windows Operating System with WYKO Vision (TM) Software, Extensive on- line help screens, 17 inch SVGA monitor, keyboard, and mouse; 9) Turret Assembly: able to house up to five interferometric objectives; 10) Linear variable displacement transformer (LVDT): to control scan linearity to better than 1.0% over a total scan range of 500 micrometers, to allow for user/field calibration; 11) Field of View Converters 0.5 and 2X field of view converter lenses which the software recognizes when enabled 12) Operator's manual. NIST also intends to purchase the following components: 1) ''Phase shifting on the Fly'' Algorithm, Special; 2) 0.5X Field of View Lens; 3) 2.0X Field of View Lens; 4) Quintuple Turret; 5) 10X Magnification Objective; 6) 40X Magnification Objective; 7) 10 Micron Step Height Standard; 8) Full Field High Resolution; 9) AIT-325 Isolation Table; 10) Workstation License for Vision Software, Special (2nd copy); 11) Excel Database Viewer; 12) 500 micro Scan Option. All components shall be calibrated and ready to be installed upon delivery by the contractor. Delivery is required Freight on Board (FOB) destination, Gaithersburg, MD. Delivery shall be required 30 days after contract award. Only written or FAX requests for the solicitation shall be honored. The FAX number is (301) 963-7732. All responsible sources may submit a proposal which shall be considered. (0041)

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