NCCOSC RDTE Division Code 02214B 53570 Silvergate Avenue Bldg A33 San Diego CA 92152-5113

67 -- RETICLE SET (PHOTOLITHOGRAPHIC MASKS) SOL N66001-95-R-0030 POC Contract Specialist, Evelyn McCullum, (619)553-4521. Contracting Officer, L. W. Hunt. Bid Clerk, J.C. Norris, (619)553-4331. Photolithographic Masks, consisting of data conversion and D-size plots shall be supplied in accordance with the following specifications: Photolithographic Mask plate specifications the data will be provided by NRaD in GDSII format at 1X scale. The CAD grid size will be 0.05 microns. D-size plots will be provided for NRaD approval before the Photomask is written. The Photomask plate shall be of the 4X reduction type for use in a GCA XLS Model 7300 I-Line stepper, as described in GCA document 081249G1 REV. 2, ''XLS Reticle Application Handbook.'' The Photomask shall be constructed of quartz. It shall measure 5 X 5 inches, and shall be either 0.090 or 0.250 inches thick, as specified by NRaD. It shall have an antireflective chrome coating. The Photomask plate flatness shall be less than or equal to 2 microns. All die are to be inspected on a die to die basis. All die are to be inspected against the database. Die registration shall be measured at 4 places per wafer by using marks provided in the data. Errors in placement shall be less than plus or minus 0.15 microns. Level to level registration shall be less than plus or minus 0.1 microns. Critical dimension tolerance shall be less than plus or minus 0.15 microns. Pellicle - upon request, the Photomask plate shall be fitted with a double sided Pellicle such as Micro-Lithography incorporated part number 13P-170-1011 or equivalent. Repellicalization - at the discretion of NRaD, the Photomask plate will be returned to the vendor, the old Pellicle removed, and a new Pellicle shall be fitted such as Micro-Lithography incorporated part number 13P-170-011 or equivalent. Performance - D-size plots must be shipped to NRaD within 3 working days after NRaD supplies data to the contractor. The first 2 layers of a Photomask set shall be shipped within 5 working days after approval of the plots. The entire Photomask set shall be shipped to NRaD within 10 working days after approval of the plots. Replacements for defective or broken Photomasks must be shipped within 3 working days after the contractor is notified of the problem. Interested parties are invited to respond to this synopsis. All responsible parties responses will be considered. Solicitation document to be issued on or about 03/01/95. For copies of solicitations only written request will be honored. See Numbered Note(s): 22. (0041)

Loren Data Corp. http://www.ld.com (SYN# 0297 19950213\67-0001.SOL)