ESC/PKOS, 104 Barksdale Street, Hanscom AFB, MA 01731-1806

66 -- LABORATORY THIN FILM DEPOSITION SYSTEM SOL F19650-95-R0092 DUE 050195 POC Mariah Houton, Contracting Specialist, 617-377-9159; John Miller, Contracting Officer, 617-377-2195; John Sorgini, Contracting Officer, 617-377-2579. The Laboratory Thin Film Deposition system shall be able to achieve vacuum pressures of 5 x 10 Torr (6.65 x 10 Pascal) or lower. The system shall come equipped with four deposition thermal deposition sources. With a sample shutter and film thickness monitor. Vacuum requirements: 5 x 10 Torr or lower with a typical pump down time of fourty-five minutes or better when vented to dry nitrogen. The vacuum chamber must consist of one 22-inch outer diameter stainless steel baseplate, one 6-inch diameter pumping port, and sixteen 1-inch feedthrough ports. Also, one 18-inch diameter x 21-high pyrex cylinder with steel implosion guard, one 22-inch diameter Aluminum top-plate, and one Telescopic heavy duty electric hoist with maximum bending moment 600 ft/lbs and capable of 360 rotation. The total system height shall not exceed 95 inches with hoist fully extended. The vacuum pumping must be one 800 liter/sec cryogenic pump and compressor such as Leybold PKR800 cryogenic pump and Leybold RW3 compressor or equivalent. Also, the vacuum pumping must have Pneumatic stainless steel gate valve, pneumatic roughing valve, pneumatic regeneration valve, pneumatic vent valve, front panel valve actuation, and Foreline pump Alcatel 16 cfm direct drive mechanical pump or equivalent. The vacuum gauging must consist of a Grandville-Phillips Model 270 vacuum gauge controller, one Ion-gauge, and two thermocouple gauges. The framework must be a 33.5 inch x 41.5 x 34 inch (1.5 BAY) welded steel frame with stainless top cover. The frame shall also have castor wheels and leveling pads. The thermal evaporation equipment must be one 2-Kilowatt (400 amp maximum output) thermal evaportation supply 208 VAC single phase 60 Hz, four 1000 amp thermal evaporation power feedthroughs with cooling capability, and a multi-boat buss bar with four thermal evaporation boat sources and four-position high current boat selection switch to allow serial deposition of the four source boats without breaking the initial vacuum. Four appropriate boats shall be supplied: one chromium source, two copper sources, and one gold source. Additionally, a static substrate fixture for 3-inch wafers, one flat blade deposition shutter (to shield the wafer during the pre-evaporation period) and, an Inficon model XTM/2 quartz crystal film deposition monitor with dual-crystal holder or equivalent. Delivery must take place 110 days after contract award. Upon delivery, the thin film deposition system must be able to fit through doorway openings 82 inches high and 70 inches wide. See Numbered Note(s): 1. (0076)

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