Goddard Space Flight Center, Code 241, Greenbelt, MD 20771

95 -- CHEMICAL VAPOR DEPOSITION SYSTEM SOL RF05-15016/062 POC Judith M. Jones, Contract Specialist, 301-286-2385, Celeste M. Dalton, Contracting Officer. This requirement is for a commercially manufactured low pressure chemical vapor deposition system for polysilicon, silicon dioxode, and silicon nitride deposition. This equipment may be used on reconditioned equipment that is warrented the same as new equipment. The system automatic loading stations (one tube for polysilicon, one for silicon dioxide, and one for silicon nitride) and an automatic process control system. Additionally, the system shall include a vacuum system, load station, scavenger, furnace and dimensions not exceeding 245''L x 45''W x 96''H). The system shall be compatible for installation in a class 100 cleanroom environment. The system shall meet the semiconductor equipment and materials international (SEMI) standards. As an option the system shall have a fourth stack for atomospheric oxidation. Additional specifications are included in this RFO. The offer due date will be established when the RFO is issued. This procurement is being conducted under the NASA/GSFC Midrange Test Pilot Program as a 100% Small Business Set-Aside. All requests for this Request for Offers (RFO) must be submitted in writing to NASA/GSFC, Code 241, Attn: Judith Jones. No collect calls, no telephone requests will be accepted, however written requests may be facsimiled to (301) 286-1745. Verification of receipt of RFO requests rests solely on the interested parties. See Numbered Note(s): 1. (0083)

Loren Data Corp. http://www.ld.com (SYN# 0292 19950327\95-0001.SOL)