ADVANCED FAILURE ANALYSIS TECHNIQUE: LIGHT-INDUCED VOLTAGE ALTERATION Transfer of National Laboratory technologies to the private sector to enhance U.S. economic competitiveness is a mission of Sandia National Laboratories. In accordance with current legislation, Sandia is seeking industrial partners for the licensing and commercialization of the following technology. Sandia National Laboratories has developed and patented failure analysis techniques for integrated circuits (ICs) using localized photon probing with a scanning optical microscope (SOM). These light-induced voltage alteration (LIVA) imaging techniques localize open-circuited and damaged junction as well as image transistor logic states. Features of LIVA include: (1) images produced by monitoring the voltage fluctuations of a constant-current power supply as a laser beam is scanned over the IC; (2) high selectivity for localizing defects; (3) transistor logic state mapping; and (4) backside failure analysis using an infrared laser source. Open circuits involving junctions can be imaged using LIVA with selectivity and signal strength large enough to examine the entire die in one image. LIVA uses photon generated electron-hole pairs to yield information about IC defects and functionality. The LIVA measurement and imaging of voltage shifts has two advantages over other failure analysis techniques that rely on direct observation of photo currents. First, the IC will act as its own current-to-voltage amplifier, producing a larger LIVA voltage signal than photo current signal. Second, IC voltage measurements are made in parallel, a simpler process than IC current measurements done in series. LIVA provides nondestructive, enhanced IC evaluation and failure localization capabilities for both front side and backside IC examination using SOM equipment. Respondents to this licensing opportunity should be fully conversant with IC failure analysis. Selected respondents will be asked to submit a business plan for the commercialization of this technology. Interested companies should send a written response within fourteen days from the date of this publication to: Kay Carter, Sandia National Laboratories, Org. 4202, M/S 1380, P.O. Box 5800, Albuquerque, NM 87185-1380, FAX (505)271-7867.

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