National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room Bll7, Gaithersburg, MD 20899

66 -- CONFOCAL OPTICAL MICROSCOPE SOL 52SBNB5C8721 DUE 052695 POC Joan M. Smith (301) 975-6458/Pauline E. Mallgrave (301) 975-6330 The National Institute of Standards and Technology (NIST) has a requirement for an optical system which will be integrated into NIST's new overlay metrology tool. The system shall be comprised of, but not limited to, a complete reflection mode illumination system, optical magnification configuration, and an observation video camera with visual eyepiece capability. The system shall be capable of operating in a confocal microscope mode as well as in the conventional bright field mode. The system shall allow for a single-aperture confocal on- axis quantitative measurement mode as well as full field confocal imaging. Detailed specifications shall be issued with the solicitation--1 each--It is anticipated that a firm fixed price contract will be awarded--Delivery is required 90 days after award-- Technical evaluation factors are: (1) Past Performance of the System, (2) Understanding the Requirements, and (3) Vendor Experience--Please request solicitations in writing--All responsible sources may submit a proposal which shall be considered by the agency. (0103)

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