Contracting Officer, Naval Research Laboratory, Attn: Code 3220.AT 4555 Overlook Avenue, S.W., Washington, DC 20375-5326

66 -- FOURIER TRANSFORM SPECTROMETER POC Evangelina R. Toledo, Contract Specialist, Code 3220.AT, Contracting Officer, Kevin M. King (202) 767-2550. The Naval Research Laboratory (NRL) has a requirement for a Fourier Transform Infrared Spectrometer for spectroscopic characterization of semiconductor materials. The instrument will be used for quantitative analysis of semiconductor materials based on infrared absorption characteristics. The required instrument must meet two primary classes of performance criteria. The first relates to operational efficiency and throughput, while the second concerns the required photometric accuracy. a) Operational Efficiency and Throughput - The instrument must be able to cover the spectral range from 12,000 inverse cm in the near infrared (IR) to 500 inverse cm in the far IR. Measurement throughout this region must be possible with no replacement of resources which requires breaking of purge and/or instrument realignment. Different resources, e.g. sources or detectors, may be used provided they are permanently installed in place, require only external operator actions to activate, and require no realignment or adjustment on being selected. Beamsplitter interchange normally requires both breaking purge and instrument realignment and therefore is incompatible with the efficiency and throughput requirements of the program. b) Photometric Accuracy - To meet photometric requirements the resolution in the far IR must be better than or equal to 1 inverse cm. This requirement is set by the width of the carbon local vibrational mode absorption at 580 inverse cm. A resolution of 4 inverse cm at 10,000 inverse cm is required. The precision of the 100% line and the zero line must be 0.1% of full-scale or better throughout the measurement range from 12,000 inverse cm to 500 inverse cm with no more than 512 co-added scans. The transmission of polished GaAs at 6250 inverse cm placed in the beam in a plane perpendicular to the beam axis must be accurate to better than 1% without operator adjustment. Spurious contributions to transmission due to reflection from the illuminated sample surface and other stray light phenomena must be below the 1% level at all times. The instrument must be designed so that radiation reflected from the front surface of transmission samples can not be returned to the sample and reduce the accuracy of the measured data. The measured transmission of 3mm thick GaAs throughout the 11,500 inverse cm to 12,000 inverse cm spectral range must be zero to better than 1% of full scale with no operator adjustment. All detectors used must be at least as linear in signal amplitude as well-constructed deuterated triglycine sulfate (DTGS) detectors over the entire amplitude range encountered. The system must be compatible with data collection on an IBM AT Compatible PC. Offerors are not required to provide a PC. Negotiations is anticipated with Applied Automation Inc., 220 Suffield Village, Suffield, CT 06078. See Note 22. NRL Reference No. AT08. (0118)

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