SELF-STRESSING AND ACCELERATED RELIABILITY TEST STRUCTURES Transfer of National Laboratory technologies to the private sector to enhance U.S. economic competitiveness is a mission of Sandia National Laboratories. In accordance with current legislation, Sandia is seeking industrial partners for the licensing and commercialization of the following technology. Sandia National Laboratories has developed and patented reliability structures known as SHIELD (Self-stressing HIgh-frequency rELiability Devices) and SENTINEL (Sandia ENhanced Test-structures for INtegrated Evaluation of Lifetime). SHIELD is a series of advanced self-stressing, on-chip high-frequency reliability structures. SENTINEL is a complete series of reliability test structures specifically tailored for the demands of accelerated wafer-level stressing such as that provided by Sandia's SWORD (Sandia Wafer-level sOftware of Reliable Devices). SHIELD, the Reliability-Test-Lab-on-a-Chip, generates its own high-frequency (greater than 500MHz) and high-temperature (greater than 400 degrees C) stress signals on-chip. This allows reliability characterization at the full frequency range of an integrated circuit (IC) technology using only an inexpensive DC wafer-level or packaged-part test system. High stress temperatures translate into shorter test times and reduced test costs. Since the stress signals are generated on-chip, the maximum frequency will increase with each new IC technology. SENTINEL's structures are used to characterize, benchmark, and improve reliability and quality of semiconductor ICs, including transistors, capacitors, metal lines, etc. Because each structure is designed to accelerate a specific failure mechanism, detailed failure analysis is not necessary. Also, special design rules are used to ensure the fastest possible tests and quickest feedback of reliability concerns to the IC fab or IC user. Respondents to this licensing opportunity should be fully conversant with IC testing structures. Selected respondents will be asked to submit a business plan for the commercialization of this technology. Interested companies should send a written response within fourteen days from the date of this publication to: Kay Carter, Sandia National Laboratories, Org. 4202, M/S 1380, P.O. Box 5800, Albuquerque, NM 87185-1380, FAX (505)271-7867.

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