National Institute of Standards and Technology, Acquisition and Assistance Division, Bldg. 301, Room B117, Gaithersburg, MD 20899

66 -- PRECISION METROLOGY STAGE SOL 52SBNB5C8770 DUE 072795 POC Elaine Libman (301) 975-6331, Pauline E. Mallgrave (301) 975-6330 The National Institute of Standards and Technology (NIST) has a requirement for the provision of a Precision Metrology Stage consisting of: Three (3) 1'' travel linear actuators with 0.1 micron resolution and 0.1 micron positioning accuracy under load; One (1) XY Theta integrated stage with 360 degrees of rotary travel and 1 arcsec resolution, 3'' XY travel and 0.1 micron resolution, and; the corresponding IEEE488-compatible stage motion controllers. The linear actuators shall be capable of 10 nanometer positioning stability in servo control. These components are being attached to an existing project which utilizes PM500 Newport controllers. System compatibility between this new stage motion system and the previous equipment is required. This is a semiconductor metrology application and the highest quality available, stage motion components shall be required. Delivery shall be within 21 weeks of contract award, FOB Destination, Gaithersburg, Maryland- -It is anticipated that the award will be a firm fixed price contract. All responsible sources may submit an offer which shall be considered by the Agency. FAX requests to (301) 963- 7732, Attention: Elaine Libman. (0159)

Loren Data Corp. http://www.ld.com (SYN# 0257 19950609\66-0005.SOL)