Loren Data Corp.

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COMMERCE BUSINESS DAILY ISSUE OF june 16,1995 PSA#1369

Naval Research Laboratory, Attn: Code 3220.JR 4555 Overlook Avenue, SW Washington, DC 20375-5326

66 -- ORGANOMETALLIC VAPOR PHASE EPITAXY REACTOR (OMVPE) COMPONENT FOR GROUP III-NITRIDE GROWTH SOL N00014-95-R-JR07 POC Jerry Riles, Contract Specialist, Code 3220.JR, (202) 767-2120, Contracting Officer, Kevin King (202) 767-2550. The Naval Research Laboratory intends to negotiate on other than full and open competitive basis with Thomas Swan Scientific Equipment, Unit 1C, Button End, Harston Cambridge, CB2 5NX, United Kingdom, for the design and building of an Epitor GaN organometallic vapor phase epitaxy (OMVPE) reactor component to be retrofitted into existing EMCORE Model 3300 OMVPE reactor at NRL-DC. The added OMVPE reactor will not result in changing the performance of the existing reactor. The OMVPE reactor component shall consist of a growth chamber, growth chamber gas distribution plumbing and vertical process gas flow, heating element and pyrometric temperature control, horizontally-oriented substrate and associated loading mechanism control, and connections for process gas, water, electrical, and exhaust. The OMVPE reactor component must fit into a prescribed space in existing equipment, must be designed for research and development semiconductor growth on two inch substrates using modest process gas flows, and operate using long-lived ()300 hour at 1050 degrees C) heating elements with high temperature (minimum 1300 degrees C) capability. Requests for information to this notice should be submitted in writing to the Naval Research Laboratory, Attn: Code 3200.JR, 4555 Overlook Avenue, S.W., Washington, DC 20375-5326; Telecopier 202-767-5896 or 202-767-6197 within fifteen days of publication of this notice. See Note 22. SYNOPSIS Ref. No. JR07. (0165)

Loren Data Corp. http://www.ld.com (SYN# 0488 19950615\66-0001.SOL)


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