Pacific Northwest Laboratories, Battelle Memorial Institute, P.O. Box 999, Attn: Alta Jones K2-02, Richland, WA 99352

66 -- VACUUM CHAMBERS SOL RPD1-2. DUE 080195. Contact Alta Jones, fax 509/375-4346. Three vacuum deposition chambers that can be pumped down and operated independently, in any combination, including removable sides for maximum flexibility for installing R&D fixturing and new deposition sources and processing hardware. Each chamber will have a dedicated, 10'' or larger diffusion pump for high vacuum pumping with associated mechanical pump(s). Two of the chambers will be for sputter and e-beam coating and one for various plasma and ion etching operations. One will therefore require chamber/pumping lines made from aluminum, with a chemical series pumping package. A central freon refrigerator will supply multi coolant baffles on all high vacuum pumping stacks. Pump sequencing and vacuum maps for all chambers will be combined in a single rack. Sputtering (dc and rf) and e-beam evaporation process hardware will also be supplied. This synopsis is not a request for proposal. Requests for copies of the solicitation will be honored if received wihin 14 days after issuance of this synopsis. No telephone requests for the solicitation package will be accepted. Deadline for submission of proposals will be contained in the RFP. (205)

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