HIGH PRECISION INTERFEREOMETRIC FOCUS SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY Sandia National Laboratories has developed an invention to couple Grazing Incidence and Laser Interferometry systems in a coarse/fine configuration to extend measurement capability beyond present industry capabilities. In addition, the Laser Interferometer can provide low noise, high accuracy, real time data sufficient for direct use in a Z axis position control (servo) system, eliminating secondary stage/servo measurement systems. This is not a solicitation. Parties interested in obtaining more details about the invention and in licensing this invention are invited to submit a letter of interest providing information about the company, area of potential application of the technology, and a point of contact. Letters should be sent to Joanne Trujillo, MS 1380, Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM 87185-1380. (FAX) (505) 271-4202.

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