Commander, Naval Air Systems Command (Code 2.0), 1421 Jefferson Davis Hwy, Arlington, Va 22243-5120

A -- EXPERIMENTAL, DEVELOPMENTAL, TEST, AND BASIC APPLIED RESEARCH WORK SOL N00019-95-R-0042 POC Contact, David P Macaluso, Phone (703)604-2119 The Naval Air Systems Command intends to procure research and development efforts for the continued development and demonstration of proximity x-ray lithography technology based upon point source and synchrotron tools. The period of performance shall be twenty-four (24) months. Tasks will concentrate on extending the state-of-the-art in x-ray lithography from 0.25 microns to .18 microns and smaller. The tasks include tool development and tool evaluation. The contractor shall develop and demonstrate high resolution x-ray masks, electron beam technology, and synchrotron and point source exposure techniques and processes at 0.18 microns and smaller dimensions as an extension of on-going efforts. The Government intends to negotiate a sole-source contract with Loral Federal Systems - Manassas, 9500 Godwin Dr., Manassas, VA 22110 for the intended research and development effort. See note No. 22 - NAVAIR Synopsis No. 50005-95. (0305)

Loren Data Corp. http://www.ld.com (SYN# 0008 19951102\A-0008.SOL)