Los Alamos National Laboratory, Mail Stop J564, P.O. Box 1663, Los Alamos, NM 87545

A -- INTENSE LARGE AREA LIGHT SOURCES FOR SEMICONDUCTOR AND FLAT-PANEL DISPLAY PROCESSING Sol IPO-96-023, contact Deborah Thornton, Senior Marketing Specialist, MS J565, Los Alamos, NM 87545, Tel: (505) 667-6159, Fax: (505) 665-2840, Email: dthornton@lanl.gov. The University of California which operates the Los Alamos National Laboratory (LANL) under contract to the Department of Energy (DOE), is seeking an industrial partner(s) in the fields of semiconductors and flat-panel display processing. Ongoing research in these fields has identified methods of using intense large area ultraviolet light sources for potential processing improvements. This very large area light source is free of hydrocarbon compounds and is capable of delivering energy density of over 2 Joules per cm2 per pulse of ultraviolet light. This method of using intense large area light sources, which is particulate- and ion-free, also has uses in a wide variety of other applications. These include annealing of amorphous silicon to polysilicon devices, annealing and activation of electrolumisescentphosphors, photoresist ashing, low temperature chemical vapor deposition, semiconductor surface cleaning, surface modification of polymers for increased adhesion, during the power coatings, and coating removal from a wide variety of materials. LANL has applied for a patent on this method. LANL is seeking an industrial partner(s) for potential additional research under a Cooperative Research and Development Agreement, and for licensing and commercial development. Any company wishing to receive more information concerning this opportunity must respond with a brief statement of intent, describing the company's technical expertise, production and marketing capabilities, financial resources, previous technology transfer experience and motivation for participating in this project. This statement must be dated within 30 days from the date of this notice, and may be sent surface mail, fax, or E-Mail. (025)

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