National Institute of Standards and Technology, Acquisition and Assistance Division, Bldg. 301, Room B117, Gaithersburg, MD 20899

99 -- STANDARD REFERENCE MATERIAL (SRM-2090) EMPLOYED AS SCANNING ELECTRON MICROSCOPE (SEM) STANDARD FOR QUALITY CONTROL SOL 52SBNB6C9071 DUE 040196 POC Keith L Kennedy 975-6325/Contracting Officer, Phyllis Bower (301) 975-6336 The National Institute of Standards and Technology (NIST) intends to procure the first full-production run of a new scanning electron microscope (SEM) magnification calibration sample. The sample shall be composed of a silicon wafer substrate covered by a patterned layer of material which is fine-grained and produces contrast at both high and low (less than 0.5 kV) accelerating voltages. Materials of choice may include, but are not limited to, heavy metal silicides, e.g., tungsten silicide, platinum silicide, titanium silicide or titanium/palladium. The patterned structures shall have a minimum thickness of 0.1 um. The patterns are formed from lines ranging in width from 0.1 micrometer to several micrometers and having center-to-center spacing ranging from about 0.2 micrometers for the thinnest lines to slightly larger than 3 mm for the widest line. The solicitation shall include artwork for the pattern. Offerors shall submit, at no cost to the government, two representative samples for evaluation of the offeror's best available technology with their proposal. NIST shall return samples after evaluation at the offeror's written request. NIST shall include one basic and four option periods. Initial performance period of one year from date of award. NIST anticipates awarding an indefinite delivery-indefinite quantity (IDIQ) type contract with delivery of required samples within 120 days of delivery order, FOB destination-Gaithersburg, MD. The minimum estimated quantities shall be 50 each and the maximum estimated quantities shall be 250 each. NIST estimates a quantity of 120 each for the base period and each of the option periods. The agency shall consider proposals from all responsible sources. The contracting office shall accept FAX requests to 301-963-7732--Attn: Keith Kennedy. See numbered notes 12 and 26. (0039)

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