Loren Data Corp.

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COMMERCE BUSINESS DAILY ISSUE OF FEBRUARY 15,1996 PSA#1532

Department of Commerce, Mountain Administrative Support Center, Procurement Division, MC3, 325 Broadway, Boulder, CO 80303-3328

66 -- COMPUTER-CONTROLLED NANOMETER RESOLUTION X-Y STAGE SOL NB814604078BJ DUE 022996 POC B J Roberts, 303-497-3799 Two-axis closed-loop positioning system consisting of power supply rack, actuator power supply, Master Oscillator, two nanosensor modules with display, two 300mA power modules, two 16-bit A-D Converters, PAR, fast parallel interface and 100 um X-Y Stage, super Invar. Range: 100 um with 0.1 nm resolution; non-linearity ( 0.2%; repeatability ( 1nm; close-loop noise 1nm rms; bandwidth 200 Hz; roll ( 0.4 urad/um; pitch ( 0.4 urad/um YAW ( 0.5 urad/um computer interface, 16 bit resolution. RFQ will not be submitted (0044)

Loren Data Corp. http://www.ld.com (SYN# 0408 19960214\66-0014.SOL)


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