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COMMERCE BUSINESS DAILY ISSUE OF FEBRUARY 15,1996 PSA#1532Department of Commerce, Mountain Administrative Support Center,
Procurement Division, MC3, 325 Broadway, Boulder, CO 80303-3328 66 -- COMPUTER-CONTROLLED NANOMETER RESOLUTION X-Y STAGE SOL
NB814604078BJ DUE 022996 POC B J Roberts, 303-497-3799 Two-axis
closed-loop positioning system consisting of power supply rack,
actuator power supply, Master Oscillator, two nanosensor modules with
display, two 300mA power modules, two 16-bit A-D Converters, PAR, fast
parallel interface and 100 um X-Y Stage, super Invar. Range: 100 um
with 0.1 nm resolution; non-linearity ( 0.2%; repeatability ( 1nm;
close-loop noise 1nm rms; bandwidth 200 Hz; roll ( 0.4 urad/um; pitch
( 0.4 urad/um YAW ( 0.5 urad/um computer interface, 16 bit resolution.
RFQ will not be submitted (0044) Loren Data Corp. http://www.ld.com (SYN# 0408 19960214\66-0014.SOL)
66 - Instruments and Laboratory Equipment Index Page
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