NASA, Johnson Space Center, EM11, Houston, TX 77058

59 -- A LABORATORY PLASMA ASHER SOL 9-EM11-54-6-06Q DUE 052196 POC Contract Specialist: Bennie Ruth Cole, (713) 483-2291 Contract Officer: Bennie Ruth Cole, (713) 483-2291 This notice constitutes a Request for Quotation (RFQ) for A Laboratory Plasma Asher System which shall consist of the following requirements: 1. Solid state RF power source with automatic fine tuning network and RF power metering for both forward and reflected power. The RF power source shall operate at 13.56 MHz and have adjustable output power from 0 to 500 watts. 2. The asher shall contain one 10 inch long quartz plasma test and treatment chamber. 3. The quartz plasma treatment chamber shall come with both a product shelf and a faraday cage insert (similiar to the LFE ''Equi-Etch'' insert). 4. The quartz plasma treatment chamber shall have a hinged, vacuum-tight door. 5. A complete vacuum pumping system, compatible with the use of aviators breathing oxygen as the working plasma gas. The capacity of the pumping system shall be not less than 1200 sccm or equivalent. 6. The plasma asher system shall have a control and status console with both controls and digital displays for: 1) forward and reverse RF power, 2) quartz plasma chamber pressure, 3) Mass flow rate of the working plasma gas, and 4) a process timer and countdown display. 7. The plasma asher shall be capable of operation at a chamber pressure of 2 torr of aviators breathing oxygen and a forward RF power of 100 watts. 8. Both the plasma asher system and the associated with vacuum pump shall operate from single phase, 115 VAC, 1000 watts continuous power source. 9. The plasma asher system shall be warrantied for not less than 6 months from the time of purchase. This Notice will close 5 June 1996. This notice serves as the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Threshold (SAT) portion of the Federal Acquisition Streamlining Act (FASA). If other than the brand name identified is quoted, then the quoter shall indicate the manufacturer, brand, and model/ part number quoted and provide a description in sufficient detail to show that the product quoted meets the brand name identified. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled ''Buy American Act Supplies,'' the quoter shall so state and shall list the country of origin. The quoter shall provide evidence of an established catalog or market price which may be an excerpt from a catalog, price list, schedule, or other verifiable and established record. The quoter shall state in their quote their size status for this procurement as well as their TAX ID NUMBER and Terms. Questions regarding this acquisition must be submitted in writing to the contracting specialist via E-mail at bennie.r.cole1@jsc.nasa.gov or by phone at (713) 483-2291 or to the contracting officer via E-mail at bennie.r.cole1@jsc.nasa.gov or by phone at (713) 483-2291. Selection and award will be made to the lowest priced, technically acceptable quoter. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. This procurement is a total small business set-aside All responsible sources may submit a quote which shall be considered by the agency. (0144)

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