Naval Research Laboratory, 4555 Overlook Ave. S.W. WASHINGTON,D.C. 20375

66 -- ETCHING STATION SOL N00173-96-Q-0064 DUE 061596 POC Cynthia Offutt, Purchasing Agent, (202) 767-3452, Fax (202) 404-8158. Naval Reseaqrch Laboratory requires a benchtop plasma etching station for use in reactive ion etching of dielectric films of Si3N4 and SiO2. Specifications will be supplied with solicitation package. Oral request will not be accepted (0144)

Loren Data Corp. http://www.ld.com (SYN# 0374 19960524\66-0007.SOL)