Loren Data Corp.

'

 
 

COMMERCE BUSINESS DAILY ISSUE OF JUNE 12,1996 PSA#1614

Commander, Naval Air Warfare Center Weapons Division, Code 210000D, 1 Administration Circle, China Lake, CA 93555-6001

66 -- UNIVERSAL COATING DEPOSITION SYSTEM SOL N68936-96-R-0235 POC Carole Lindemann, Contract Specialist, 619-939-8196. The Naval Air Warfare Center China Lake, CA intends to award a contract to CHA Industries for a Model Mark 50 vacuum deposition system on other than full and open competition basis because CHA Industries manufacture the only commercially-proven vacuum-deposition system that is capable of coating three, 11-inch diameter 80 pound substrates in a single run and can be accommodated in a maximum floor space of 7 x 13 feet. The system is for depositing thin films for optical and electronic components using e-beam evaporation and provides a coating thickness uniformity of +/- 5% over the 11 inch diameter substrate. The unit features a space saving vertically-rolling slide-down front door to permit use in limited floor space. The system is capable of holding and rotating over 250 pounds of substrates in a high-usage, production environment. Additional accessory items include three-dome fixture; flat planetary substrate holder; dome hanger support for rotary fixture items; internally-mounted-ion gun with external power supply and controller for ion-assisted e-beam deposition; internally-mounted, rf-magnetron-sputter guns with external power supplies; extra rear door; 18 inch x 18 inch micrometer adjustable, variable orifice throttle valve; mass flow controls for three gases; heater array/heater power supply; optical thickness monitor with chip-changer; automatic regeneration option for cryogenic pump; thermal-evaporation swing source; thermocouple feedthroughs; residual gas analyzer, and top-mounted thickness monitor sensor. This procurement will include installation, benchmark demonstration, training, and all necessary cables, controllers, interfaces, hardware and manuals to permit complete system operation and maintenance. Interested parties other than CHA must respond in accordance with Note 22 of the Commerce Business Daily See Numbered Note(s): 22. (0162)

Loren Data Corp. http://www.ld.com (SYN# 0261 19960611\66-0003.SOL)


66 - Instruments and Laboratory Equipment Index Page