|
COMMERCE BUSINESS DAILY ISSUE OF JUNE 12,1996 PSA#1614Commander, Naval Air Warfare Center Weapons Division, Code 210000D, 1
Administration Circle, China Lake, CA 93555-6001 66 -- UNIVERSAL COATING DEPOSITION SYSTEM SOL N68936-96-R-0235 POC
Carole Lindemann, Contract Specialist, 619-939-8196. The Naval Air
Warfare Center China Lake, CA intends to award a contract to CHA
Industries for a Model Mark 50 vacuum deposition system on other than
full and open competition basis because CHA Industries manufacture the
only commercially-proven vacuum-deposition system that is capable of
coating three, 11-inch diameter 80 pound substrates in a single run and
can be accommodated in a maximum floor space of 7 x 13 feet. The system
is for depositing thin films for optical and electronic components
using e-beam evaporation and provides a coating thickness uniformity of
+/- 5% over the 11 inch diameter substrate. The unit features a space
saving vertically-rolling slide-down front door to permit use in
limited floor space. The system is capable of holding and rotating over
250 pounds of substrates in a high-usage, production environment.
Additional accessory items include three-dome fixture; flat planetary
substrate holder; dome hanger support for rotary fixture items;
internally-mounted-ion gun with external power supply and controller
for ion-assisted e-beam deposition; internally-mounted,
rf-magnetron-sputter guns with external power supplies; extra rear
door; 18 inch x 18 inch micrometer adjustable, variable orifice
throttle valve; mass flow controls for three gases; heater array/heater
power supply; optical thickness monitor with chip-changer; automatic
regeneration option for cryogenic pump; thermal-evaporation swing
source; thermocouple feedthroughs; residual gas analyzer, and
top-mounted thickness monitor sensor. This procurement will include
installation, benchmark demonstration, training, and all necessary
cables, controllers, interfaces, hardware and manuals to permit
complete system operation and maintenance. Interested parties other
than CHA must respond in accordance with Note 22 of the Commerce
Business Daily See Numbered Note(s): 22. (0162) Loren Data Corp. http://www.ld.com (SYN# 0261 19960611\66-0003.SOL)
66 - Instruments and Laboratory Equipment Index Page
|
|