Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP-SD-PC, 2800 Powder Mill Road, Adelphi, MD 20783-1197

66 -- ELECTRON CYCLOTRON RESONANCE (ECR) PLASMA ETCHING SYSTEM SOL DAAL01-96-R-9397 DUE 090496 POC Linda Klein, Contract Specialist, (301) 394-3372, Carolyn S. Gonser, Contracting Officer, (301) 394-1604. The Army Research Laboratory is interested in procuring one (1) Electron Cyclotron Resonance (ECR) Plasma Etching System for purposes related to electro-optical applied research. The ECR system shall have the capability of etching HgCdTe and other materials used in the semiconductor industry using a high density, low pressure plasma. The system framework shall be manufactured out of non-particulating materials. The system control shall be user interface friendly and shall run from a contractor provided IBM-compatible personal computer operating under Windows 3.1 or DOS 6.2 or later version. The system shall be operable in both manual and automatic mode. The process chamber shall be constructed of stainless steel. The plasma source shall use an ASTEX one kilowatt plasma source that includes microwave power, circulator with integral power monitor, dummy load, manual three stub tuner, symmetrical plasma coupler with vertical viewport, 5 kilowatt magnet and regulated switching power supply. A secondary collimating electromagnet assembly shall be included in the system with a 2.5 kilowatt magnet and regulated power supply positioned concentric to the substrate which permits control of incident ion current at the cathode. The anticipated delivery destination is a warehouse at Army Research Laboratory, Adelphi, MD, where the system will be stored. The anticipated delivery date is not later than 20 months after contract award. Installation of this system may not be required until March 1999. The delivery destination, required delivery date, and date of installation are contingent upon the anticipated completion date of the building which will house this system. Specific delivery and installation instructions will be discussed in the solicitation. The proposed contract listed here is 100 percent small business set-aside. Offers from concerns other than small business concerns are not solicited. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. (0205)

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