National Institute of Standards and Technology, Acquisition and Assistance Division, Bldg 301, Room B117, Gaithersburg, MD 20899

66 -- WAFER DEPOSITION SYSTEM SOL 53SBNB6C9228 DUE 081696 POC Diane Loeb (301) 975-6399, Sharon Farinholt (301) 975-6339 The National Institute of Standards & Technology (NIST) intends to procure a wafer deposition system which will be utilized by the Optical Technology Division for research in the detection, identification, and sizing on silicon wafers. The wafer deposition system shall consist of the following: stainless steel atomizer, drying system, deposition chamber, timer controlled, able to hold 100, 125, 150, 200 mm wafers, system not to exceed 55x50x70 cm, 115 VAC power, spare atomizer for 1 um to 2 um use, spare atomizer for 0.1 um to 1.0 um particle use. Delivery is FOB Gaithersburg, MD within 120 days after award. The Government anticipates award of a firm-fixed price purchase order using best value method of acquisition. All responsible sources may submit a proposal or quotation which shall be considered by the agency. Alternate proposals for refurbished equipment warranteed as new are encouraged. Copies of the solicitation will be provided in response to telephonic and faxed requests. Fax phone number is (301)963-7732. (specify item and specifics). Delivery is FOB Gaithersburg, MD within 60 days after award. (0205)

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