Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP- SD-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- INSTRUMENTS AND LABORATORY EQUIPMENT SOL DAAL01-96-R-9807 DUE 081296 POC Kim Sweep, Contract Specialist, (301) 394-4681, Kathleen M. Tennant, Contracting Officer, (301) 394-3439. The Army Research Laboratory intends to procure a Plasma Therm 790 Plasma Enhanced Chemical Vapor Deposition system. Delivery is required by 31 December 1996. This synopsis is being modified to change that portion which reads ''...500 watt RF generator, 50-460 kHz, at 13.56 MHZ...'' to ''...500 watt RF generator at 13.56 MHz...'' and that portion which reads ''...gas containment module, with 2 MFCs, (silane, oxygen), additional MFC for Ammonia with metal seal, additional MFC for Helium...'' to ''...gas containment module, with 5 MFCs, (i.e., 1-silane at 15%, 1-Ammonia with metal seal, 1-Helium, 1-oxygen, and 1-Nitrogen)...'' The proposal due date is changed from 1 August 1996 to 12 August 1996. (0211)

Loren Data Corp. http://www.ld.com (SYN# 0470 19960730\66-0007.SOL)